Pull-In Analysis of the Flat Circular CMUT Cell Featuring Sealed Cavity

Zhang, Wen; Zhang, Hui; Du, Fei; Shi, Jianxin; Jin, Shijiu; Zeng, Zhoumo

doi:10.1155/2015/150279

Cited by 15 publications

(14 citation statements)

References 16 publications

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“…The resonant frequencies of the transducer with the same structure parameters for airborne and underwater applications are also analyzed by finite element method and the results are compared with (1) and (2). As shown in Figures 2 and 3, the results of the harmonic analysis simulated by the COMSOL Multiphysics software are 2.50 MHz and 0.7 MHz, which are consistent with the theoretical analysis of a clamped circular plate.…”

Section: Geometry Design Of Cmut Cell and Linear Arraysupporting

confidence: 65%

“…A CMUT cell is built with a circular, square, or hexagonal membrane separated from a fixed substrate by a small airgap [2,20]. The geometry of the circular CMUT cell is shown in Figure 1.…”

Section: Geometry Design Of Cmut Cell and Linear Arraymentioning

confidence: 99%

“…Moreover, the MEMS technology controls the accuracy in micrometer ( m) magnitude, which largely reduces the fabrication errors and improves the consistency between arrays. Also, MEMS technology utilizes the silicon piezoresistivity or capacitance change to achieve the detection of acoustic signals, so the imaging resolution can be improved, too [2].…”

Section: Introductionmentioning

confidence: 99%

“…In 2006, Caronti et al developed a one-dimensional array of ultrasonic transducers and detectors used in medical ultrasonic imaging [14]. In China, Tianjin University was the first research group and they launched a research program using a CMUT array as the imaging and nondestructive detecting planar array [2,15]. The Institute of Acoustics, Chinese Academy of Sciences, developed a microcapacitive microphone of circular structure [16].…”

Section: Introductionmentioning

confidence: 99%

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A Two-Dimensional CMUT Linear Array for Underwater Applications: Directivity Analysis and Design Optimization

et al. 2016

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Capacitive micromachined ultrasonic transducers (CMUTs) are one of the promising MEMS devices. This paper proposed an integrated vibration membrane structure to design a two-dimensional CMUT linear array for underwater applications. The operation frequencies for different medium have been calculated and simulated, which are 2.5 MHz in air and 0.7 MHz in water. The directivity analyses for the CMUT cell, subarray, and linear array have been provided. According to the product theorems, the directivity function of the complex array is obtained using a combination of the directivity functions of certain simple structures. Results show that the directivity of a CMUT cell is weak due to the small size, but the directivity of the designed linear array is very strong. Influential parameters of the linear array have been discussed, including the cell numbers, the adjacent distance, and the operation medium. In order to further suppress the side lobe interference and improve the resolution and the imaging quality of the imaging system, several weighting methods are used for optimization and comparison. Satisfactory side lobe suppression results are obtained, which can meet the actual requirements.

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Section: Geometry Design Of Cmut Cell and Linear Arraysupporting

confidence: 65%

“…A CMUT cell is built with a circular, square, or hexagonal membrane separated from a fixed substrate by a small airgap [2,20]. The geometry of the circular CMUT cell is shown in Figure 1.…”

Section: Geometry Design Of Cmut Cell and Linear Arraymentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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A Two-Dimensional CMUT Linear Array for Underwater Applications: Directivity Analysis and Design Optimization

et al. 2016

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“…A typical CMUT is built with a square, rectangular, circular, or hexagonal membrane separated from a fixed substrate by a small airgap [ 13 , 14 ]. The working principles are illustrated in Figure 1 .…”

Section: Introductionmentioning

confidence: 99%

An Analytical Model for CMUTs with Square Multilayer Membranes Using the Ritz Method

Zhang¹,

Zhang²,

Jin³

et al. 2016

Micromachines

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Capacitive micromachined ultrasonic transducer (CMUT) multilayer membrane plays an important role in the performance metrics including the transmitting efficiency and the receiving sensitivity. However, there are few studies of the multilayer membranes. Some analytical models simplify the multilayer membrane as monolayer, which results in inaccuracies. This paper presents a new analytical model for CMUTs with multilayer membranes, which can rapidly and accurately predict static deflection and response frequency of the multilayer membrane under external pressures. The derivation is based on the Ritz method and Hamilton’s principle. The mathematical relationships between the external pressure, static deflection, and response frequency are obtained. Relevant residual stress compensation method is derived. The model has been verified for three-layer and double-layer CMUT membranes by comparing its results with finite element method (FEM) simulations, experimental data, and other monolayer models that treat CMUTs as monolayer plates/membranes. For three-layer CMUT membranes, the relative errors are ranging from 0.71%–3.51% for the static deflection profiles, and 0.35%–4.96% for the response frequencies, respectively. For the double-layer CMUT membrane, the relative error with residual stress compensation is 4.14% for the central deflection, and −1.17% for the response frequencies, respectively. This proposed analytical model can serve as a reliable reference and an accurate tool for CMUT design and optimization.

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Micro-structured PDMS piezoelectric enhancement through charging conditions

Kachroudi¹,

Basrour²,

Rufer³

et al. 2016

Smart Mater. Struct.

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Micro-structured cellular polydimethylsiloxane (PDMS) materials were prepared by a low-cost molding process allowing us to control geometry and sample size. Cellular structures are charged with a triangular quasi-static voltage with amplitudes between 1 kV and 4 kV and a frequency of 0.5 Hz fixed after having evaluated the conditions enhancing the piezoelectric response of the cellular PDMS. The piezo-electret PDMS material charged at room temperature has a piezoelectric coefficient d 33 of 350 pC/N, which is ten times larger than that of polyvinylidene fluoride. The high piezoelectric coefficient with a very low elastic modulus of 300 kPa makes these materials very useful for wearable device applications. The piezoelectric coefficient d 33 of the samples poled at high temperatures improves thermal stability but reduces PDMS piezoelectret piezoelectricity, which is explained by the structure's stiffness. These results are useful and allow us to set the conditions for the preparation of the piezo-electret materials according to desired applications.

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Pull-In Analysis of the Flat Circular CMUT Cell Featuring Sealed Cavity

Cited by 15 publications

References 16 publications

A Two-Dimensional CMUT Linear Array for Underwater Applications: Directivity Analysis and Design Optimization

A Two-Dimensional CMUT Linear Array for Underwater Applications: Directivity Analysis and Design Optimization

An Analytical Model for CMUTs with Square Multilayer Membranes Using the Ritz Method

Micro-structured PDMS piezoelectric enhancement through charging conditions

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