Publisher’s Note: “Vacuum ultraviolet circular dichroism spectroscopy using an ac-modulated polarizing undulator” [Rev. Sci. Instrum. <b>76</b>, 093103 (2005)]

Yamada, Tōru; Yagi-Watanabe, Kazutoshi; Tanaka, Masahito; Kaneko, Fusae; Kitada, T.; Ohta, Yasumi; Nakagawa, Kazumichi

doi:10.1063/1.2119127

Cited by 12 publications

(28 citation statements)

References 0 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…60 Since the oxidation system has been described in detail elsewhere, 8 only the preheating unit is explained here. The preheating unit is made of SiC composite shrouded in fused quartz to inhibit gas pollution and includes an infrared lamp heater.…”

Section: A Sample Preparation By Pgpmentioning

confidence: 99%

Additional fluorine passivation to pyrolytic-N2O passivated ultrathin silicon oxide/Si(100) films

Yamada

2006

Journal of Applied Physics

View full text Add to dashboard Cite

To enhance the reliability of ultrathin silicon oxide/Si(100) films and clarify the effect of fluorine on it, in situ pyrolytic-gas passivation (PGP) using NF3 was simultaneously performed with the previously proposed PGP using N2O. As a result, the following synergistic effects of F and N passivation for the films were confirmed: The electrical characteristics, such as the time-dependent dielectric breakdown lifetime, potential barrier height energy of the oxide, and interface state density, were significantly improved. Quantitative analyses of F and N indicated that this is probably caused by microscopic structural changes in the oxide near the oxide-Si(100) substrate interface. It is, therefore, believed that F passivation effectively contributes to compensate the inconsistent-state bonding sites near the interface that remain with N passivation.

show abstract

Section: A Sample Preparation By Pgpmentioning

confidence: 99%

Additional fluorine passivation to pyrolytic-N2O passivated ultrathin silicon oxide/Si(100) films

Yamada

2006

Journal of Applied Physics

View full text Add to dashboard Cite

show abstract

“…9,10 Principle and instrumentation of the measurement have been reported in our previous paper. 4 Recently, we made improvements on our instrumentation in order to achieve more precise measurements. Progress is reported in this work toward a more quantitative comparison of experimental vuv-CD spectra with calculations.…”

Section: Introductionmentioning

confidence: 99%

“…We have established a method for CD spectroscopy in the vuv region using the Onuki-type undulator. 4,5 We also achieved vuv-CD measurements for amino acid films at wavelength range of 120-220 nm. 9,10 Principle and instrumentation of the measurement have been reported in our previous paper.…”

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Recent progress in vacuum-ultraviolet polarization modulation spectroscopy using polarizing undulator at the TERAS BL5 beamline

Yagi-Watanabe

Tanaka

Kaneko

et al. 2007

Review of Scientific Instruments

Self Cite

View full text Add to dashboard Cite

Polarization modulation spectroscopy using an Onuki-type undulator is a useful technique for circular dichroism study in the vacuum-ultraviolet region. We have been developing the vacuum-ultraviolet circular dichroism (vuv-CD) spectroscopy in TERAS BL5 beamline at AIST. This paper describes recent improvements in our instrumentation and methods of analysis to achieve precise and absolute measurements. The CD signal is usually accompanied by experimental artifacts, and elimination of all possible artifacts is the key issue for making reliable measurements. After improving beamline optical system, light flux monitor, and undulator operation method, the base line shift of the CD spectrum is suppressed less than 3x10(-4). Sample manipulation and data processing procedures are also described and absolute CD spectrum can be obtained even for linear anisotropic sample. These progresses lead to more quantitative comparison of experimental with calculation on vuv-CD spectrum.

show abstract

“…41,42 In the mid-2000s, new attempts were made to use IR birefringence mapping 43,44 and imaging 45,46 to measure bulk residual stresses in mc-Si wafers, building on earlier successes with single-crystalline wafers. 47,48 It was proposed that the large grain-to-grain variations in birefringence intensities observed previously may be due to the presence of a variety of microdefects suspected or confirmed to exhibit a birefringence signal, including dislocations 44,49 and GBs. 43,50,51 These initial investigations invite a comprehensive, systematic, and statistically meaningful study to decouple different stress contributions, validated by microstructural measurements.…”

Section: History Of Birefringencementioning

confidence: 99%

Infrared birefringence imaging of residual stress and bulk defects in multicrystalline silicon

Ganapati

Schoenfelder

Castellanos

et al. 2010

Journal of Applied Physics

View full text Add to dashboard Cite

This manuscript concerns the application of infrared birefringence imaging ͑IBI͒ to quantify macroscopic and microscopic internal stresses in multicrystalline silicon ͑mc-Si͒ solar cell materials. We review progress to date, and advance four closely related topics. ͑1͒ We present a method to decouple macroscopic thermally-induced residual stresses and microscopic bulk defect related stresses. In contrast to previous reports, thermally-induced residual stresses in wafer-sized samples are generally found to be less than 5 MPa, while defect-related stresses can be several times larger. ͑2͒ We describe the unique IR birefringence signatures, including stress magnitudes and directions, of common microdefects in mc-Si solar cell materials including: ␤-SiC and ␤-Si 3 N 4 microdefects, twin bands, nontwin grain boundaries, and dislocation bands. In certain defects, local stresses up to 40 MPa can be present. ͑3͒ We relate observed stresses to other topics of interest in solar cell manufacturing, including transition metal precipitation, wafer mechanical strength, and minority carrier lifetime. ͑4͒ We discuss the potential of IBI as a quality-control technique in industrial solar cell manufacturing.

show abstract

Publisher’s Note: “Vacuum ultraviolet circular dichroism spectroscopy using an ac-modulated polarizing undulator” [Rev. Sci. Instrum. 76, 093103 (2005)]

Cited by 12 publications

References 0 publications

Additional fluorine passivation to pyrolytic-N2O passivated ultrathin silicon oxide/Si(100) films

Additional fluorine passivation to pyrolytic-N2O passivated ultrathin silicon oxide/Si(100) films

Recent progress in vacuum-ultraviolet polarization modulation spectroscopy using polarizing undulator at the TERAS BL5 beamline

Infrared birefringence imaging of residual stress and bulk defects in multicrystalline silicon

Contact Info

Product

Resources

About