“…Model (I) is based on Smoluchowski aggregation kinetics − and allows for: cyclic generation of single atoms on both the substrate surface and the NPs (deposition); surface diffusion and irreversible aggregation of single atoms; atom attachment to NP (adatom capture); and NP diffusion and coalescence. The NP mobility was assumed to follow a power law of the kind D k = D 1 ( t ) k – s , ,,,− where k is the number of atoms comprising the NP, D 1 ( t ) is the diffusion rate of adatoms, and s > 0. The value of the exponent s typically ranges between 0 and 2 depending on the diffusion mechanism and is, in general, a poorly understood function of NP morphology, NP–substrate interaction, reacting atmosphere, and temperature. ,, As such, here it is regarded as a fitting parameter.…”