Pt-Ni / Pt-Zr electrodes for stable SAW resonator operation during repeated temperature cycling up to 1000&amp;#x00B0;C

Cunha, M. Pereira da; Maskay, A.; Lad, Robert J.; Frankel, D.; Moulzolf, Scott C.; Call, Mindy K.; Bernhardt, G.

doi:10.1109/ultsym.2015.0028

Cited by 14 publications

(14 citation statements)

References 10 publications

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“…It shows that this electrode can work at 1200 °C only in a short period of time. Compared to other reported multilayer electrodes such as Pt-Rh/HfO 2 [6] and Al 2 O 3 /Pt-Ni/Al 2 O 3 [11], the stability of this Al 2 O 3 /Pt/ZnO/Al 2 O 3 /LGS electrode at high temperature has been improved greatly.…”

Section: Resultsmentioning

confidence: 85%

“…The reduction of the diffusion in Al 2 O 3 /Pt/Al 2 O 3 /LGS sample was attributed to the higher chemical stability of Al 2 O 3 [13,14,15]. Until now, the Al 2 O 3 /Pt-Ni/Al 2 O 3 film electrode [11] has demonstrated that the Al 2 O 3 film can be used as a suitable diffusion barrier layer for LGS substrate. It was the reason why we focus on the film electrode by using Al 2 O 3 barrier layer next.…”

Section: Resultsmentioning

confidence: 99%

“…Rane [9,10] used tungsten film electrodes to prevent the diffusion of Ga and O atoms from the substrate and obtained stable sensors up to 800 °C. Pereira da Cunha [11] investigated a Pt-Ni/Pt-Zr electrode containing an Al 2 O 3 interfacial layer that was used to reduce the degradation of the electrode layer by inhibiting the interdiffusion and interfacial reactions. In our previous work [12], we prepared a AlN/Pt/ZnO multilayered electrode on Langasite (LGS, La 3 Ga 5 SiO 14 ) substrate and found that the ZnO buffer layer improved the crystalline quality of Pt by inhibiting the recrystallization of Pt film at 1000 °C, showing that the crystalline quality is an important factor in determining the stability of film electrodes at high temperature.…”

Section: Introductionmentioning

confidence: 99%

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Improvement of High-Temperature Stability of Al2O3/Pt/ZnO/Al2O3 Film Electrode for SAW Devices by Using Al2O3 Barrier Layer

et al. 2017

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In order to develop film electrodes for the surface acoustic wave (SAW) devices operating in harsh high-temperature environments, novel Al2O3/Pt/ZnO/Al2O3 multilayered film electrodes were prepared by laser molecular beam epitaxy (LMBE) at 150 °C. The first Al2O3 layer was used as a barrier layer to prevent the diffusion of Ga, La, and Si atoms from the La3Ga5SiO14 (LGS) substrate to the film electrode and thus improved the crystalline quality of ZnO and Pt films. It was found that the resistance of the Al2O3/Pt/ZnO/Al2O3 electrode did not vary up to a temperature of 1150 °C, suggesting a high reliability of electrode under harsh high-temperature environments. The mechanism of the stable resistance of the Al2O3/Pt/ZnO/Al2O3 film electrodes at high temperature was investigated by analyzing its microstructure. The proposed Al2O3/Pt/ZnO/Al2O3 film electrode has great potential for application in high-temperature SAW devices.

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Section: Resultsmentioning

confidence: 85%

Section: Resultsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Improvement of High-Temperature Stability of Al2O3/Pt/ZnO/Al2O3 Film Electrode for SAW Devices by Using Al2O3 Barrier Layer

et al. 2017

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“…The type of thin film electrode selected to fabricate the LGS SAWR sensor is critical for high-temperature harshenvironment operation. From the different types of thin film electrode structures developed by the University of Maine (UMaine) group for high-temperature wired and wireless sensor applications [12], [19]- [23], the multilayered Pt-Ni|Pt-Zr film has been selected in this work for the fabricated strain sensors, due to the observed good performance at high-temperature and sensor stability.…”

Section: Device Fabricationmentioning

confidence: 99%

“…At this operating frequency, the designed device is approximately 4mm by 9mm, which was considered an appropriate size to mount on the constant stress beam, and also comparable in size with the commercial room temperature static strain gauge (4.8mm x 6.9mm) used in this work for validation of the FEM model. In addition, UMaine had prior experience with 195 MHz LGS sensors as temperature sensors [12], [19]- [23] and as pressure sensors [24], which was used as baseline comparison for the quality of the devices fabricated. The thin film electrode structure consists of a 50 nm Al 2 O 3 thick interfacial layer deposited using atomic layer deposition (ALD) on top of the entire LGS substrate, followed by 10 nm thick zirconium (Zr) adhesion layer, and the multilayered Pt-Ni|Pt-Zr film, which consists of 15 nm co-deposited Pt-Ni interlaced with 15 nm of co-deposited Pt-Zr, five layers of each, to a total of 150 nm.…”

Section: Device Fabricationmentioning

confidence: 99%

High-temperature static strain langasite SAWR sensor: Temperature compensation and numerical calibration for direct strain reading

Maskay

Cunha

2017

Sensors and Actuators A: Physical

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High-temperature harsh-environment strain sensors are needed for industrial process monitoring and control, fault detection, structural health monitoring applications, in power plant environments, steel and refractory material manufacturing, aerospace, and defense [1]-[4]. At temperatures above a few hundred degree Celsius and under the harsh-environments encountered in the aforementioned applications, strain sensing poses significant challenges. Among these one can list: (i) the resilience of the sensor itself; (ii) difficulty in attaching the sensor to the part to be monitored due to mismatch between the coefficient of thermal expansion (CTE) of the sensor material and the CTE of the test part; (iii) high-temperature harsh-environment sensor packaging; and (iv) quick variations in environmental conditions (e.g., temperature, pressure, and vibration) [5], [6]. Wired strain gauge, which operates based on gauge resistance as a function of strain, is one of the hightemperature static strain sensor technologies available and reported to operate at temperatures in excess of 1300°C [7]. These sensors are made of high-temperature capable materials that are either welded to the test part by flame spraying technique or attached by epoxying the sensor using a ceramic-based cement. Current limitations in wired strain gauge performance and applications are related to: (i) sensor wiring; (ii) bulky harsh-environment attachment and housing (such as fiberglass insulation or ceramic braiding or a metal jacket); (iii) drift in response due to oxidation; (iv) accuracy and precision [8]. Commercially available optical strain sensors use Fiber Bragg Grating technology (FBG) and target operation up to 1000°C for oil and gas pipeline leakage, structural health, and security monitoring [9]. These sensors can be lightweight and small, but may drift due to changes in fiber doping profile at high-temperature, harsh-environment. In addition, they suffer the interference of deposits in lenses or interfaces, and may require special housing and packaging for access in high-temperature operation conditions, which adds volume to the sensor assembly and complicates instrumentation [10]. Capacitive micro-electro-mechanical-systems (MEMS) static pressure sensors implemented as individual devices or as thin films deposited directly on the part to be monitored have been explored in the temperature range of 600°C to 1100°C [8], [11]. The devices have been fabricated using wide band-gap materials, such as silicon carbide (SiC) for up to 600°C, and high-temperature substrates, such as alumina, for thin film deposition up to 1100°C. MEMS based sensors often require signal conditioning and amplification through embedded integrated circuitry, which translates into increased complexity, size, and weight. The need for battery or some sort of power source often implies the necessity of regular maintenance, which increases cost and is a complication for high-temperature operation of MEMS-based harsh-environment static strain sensors. Overall, a limiting aspe...

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Influence of electrode apodization weighted structure on the performance of SAW temperature sensors

Liu

Yang

et al. 2023

J. Micromech. Microeng.

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In order to improve the comprehensive performance of the SAW temperature sensors and reduce clutter interference, the optimized Chebyshev window function, Blackman window function and Hamming window function are used to carry out the apodization weighting design for IDT and reflective grating respectively. The influence of electrode structure on the performance of SAW temperature sensors is systematically studied through experiments. The results show that the apodization weighted design of IDT and reflective gate can effectively improve the resonance peak intensity and reduce the side lobe interference; The IDT and the reflection grating are designed with apodization weighting at the same time, compared with the single reflection grating weighting, the volatility of the side lobe of the Chebyshev window function and the Hamming window function increases, the volatility of the side lobe of the Blackman window function decreases; After electrode apodization optimization, the resonance frequency, Q value of the SAW sensor and the sensitivity to temperature increases; Using a hamming window optimized electrode structure, the peak value of S11 is -36.73dB and the Q value is 15030. In order to ensure the signal processing ability and comprehensive performance of the sensor, an optimized Hamming window should be used for the electrode design of the SAW sensors.

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Pt-Ni / Pt-Zr electrodes for stable SAW resonator operation during repeated temperature cycling up to 1000°C

Cited by 14 publications

References 10 publications

Improvement of High-Temperature Stability of Al2O3/Pt/ZnO/Al2O3 Film Electrode for SAW Devices by Using Al2O3 Barrier Layer

Improvement of High-Temperature Stability of Al2O3/Pt/ZnO/Al2O3 Film Electrode for SAW Devices by Using Al2O3 Barrier Layer

High-temperature static strain langasite SAWR sensor: Temperature compensation and numerical calibration for direct strain reading

Influence of electrode apodization weighted structure on the performance of SAW temperature sensors

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