Proton radiation hardening of silicon oxynitride gate nMOSFETs formed by nitrogen implantation into silicon prior to oxidation

Diniz, J. A.; Fo, J. Godoy; Zakia, M.B.P.; Doi, L.; Swart, Jacobus W.

doi:10.1109/radecs.2001.1159285

RADECS 2001. 2001 6th European Conference on Radiation and Its Effects on Components and Systems (Cat. No.01TH8605)

DOI: 10.1109/radecs.2001.1159285

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Proton radiation hardening of silicon oxynitride gate nMOSFETs formed by nitrogen implantation into silicon prior to oxidation

J. A. Diniz

J. Godoy Fo

M.B.P. Zakia

et al.

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Proton radiation hardening of silicon oxynitride gate nMOSFETs formed by nitrogen implantation into silicon prior to oxidation

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References 9 publications

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