Proteus SMO for process window improvement

Chen, Kun-Yuan; Lan, Andy; Yang, Richer; Liu, Jing Jing; Xu, Ting; Lin, Cheng-Shuan; Ding, Hua; Lee, Chih-Jie; Dam, Thuc; Jia, Jianjun

doi:10.1117/12.2552230

Optical Microlithography XXXIII 2020

DOI: 10.1117/12.2552230

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Proteus SMO for process window improvement

Kun-Yuan Chen¹,

Andy Lan²,

Richer Yang³

et al.

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