2010 35th IEEE Photovoltaic Specialists Conference 2010
DOI: 10.1109/pvsc.2010.5616776
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Protection of Si-SiO<inf>2</inf> interfaces from damp heat by overlying SiN<inf>x</inf> and Si<inf>3</inf>N<inf>4</inf> coatings

Abstract: PECVD SiNx antireflection coatings are found to suppress the degradation of an underlying oxide during "damp-heat" exposure. Samples are submitted to 85°C and 85% relative humidity, replicating the damp-heat conditions of the standard reliability tests for PV modules. The samples are diffused with phosphorus and passivated with a thermal oxide, where the resistivity of the diffusion and the oxide thickness are similar to those used in many high efficiency silicon solar cells. We find that when the samples are … Show more

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Cited by 3 publications
(2 citation statements)
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“…The samples with and without a UV filter, respectively, do show a very similar behavior regardless of the set humidity of the climate chamber. This indicates that humidity as a possible factor causing SRD can be ruled out which is in accordance with results indicating that SiN x :H protects the surface passivation against humidity [37], [38]. With this result, it is unlikely that humidity influences LeTID since it is a BRD phenomenon, although further investigations might be necessary to confirm this assumption.…”
Section: F Influence Of Humidity On Srdsupporting
confidence: 88%
“…The samples with and without a UV filter, respectively, do show a very similar behavior regardless of the set humidity of the climate chamber. This indicates that humidity as a possible factor causing SRD can be ruled out which is in accordance with results indicating that SiN x :H protects the surface passivation against humidity [37], [38]. With this result, it is unlikely that humidity influences LeTID since it is a BRD phenomenon, although further investigations might be necessary to confirm this assumption.…”
Section: F Influence Of Humidity On Srdsupporting
confidence: 88%
“…Amorphous silicon nitride (SiNx) prepared using plasma enhanced chemical vapour deposition (PECVD) is an indispensable element in virtually every commercial solar cell [1,2]. The reason for its importance is that the film perfonns 978-1-4799-4398-2/14/$31.00 ©2014 IEEE three crucial functions: (i) it comprises the antireflection coating [1]; (ii) it provides surface and bulk passivation [3][4][5]; and (iii) it fonns a chemical barrier to protect underlying interfaces from the degrading effects of moisture, humidity [6,7] and sodium ions [8,9].…”
Section: Introductionmentioning
confidence: 99%