Prospective technology for system-on-a-chip: N 2 implant followed by VHP O 2 reoxidation

Luo, Tien-Ying; Alshareef, Husam N.; Brown, George; Watt, V.H.C.; Karamcheti, A.; Jackson, Matthew I.; Huff, Howard R.; Evans, B.; Lee, Chongmok; Luan, H.F.; Kwong, Dim‐Lee

doi:10.1117/12.395738

SPIE Proceedings

2000

DOI: 10.1117/12.395738

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Prospective technology for system-on-a-chip: N 2 implant followed by VHP O 2 reoxidation

Tien-Ying Luo¹,

Husam N. Alshareef²,

George Brown³

et al.

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Prospective technology for system-on-a-chip: N 2 implant followed by VHP O 2 reoxidation

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