Proposition of a new geometry of the electrodes in a particular discharge

Bouchikhi, Abdelaziz

doi:10.1007/s12648-019-01452-4

Cited by 5 publications

(3 citation statements)

References 14 publications

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“…The system of partial differential equations is discretized using the finite-difference method. Moreover, the equations of transport of particles and the energy have been discretized according to the exponential scheme [33][34][35]. The Poisson's equation has been discretized spatially by the central difference technique.…”

Section: Boundary Conditionsmentioning

confidence: 99%

Study of the Neon Dielectric Barrier Discharge on a Capacitively Coupled Radio Frequency at a Low Pressure with Metastable Atom Density: Effect of the Pressure

Bouchikhi¹

2022

Ukr. J. Phys.

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We study the neon dielectric barrier discharge with metastable atom density on a capacitively coupled radio frequency at a pressure of about 4–12 Torr. The transport parameters of neon are dependent on the electron energy, and their range is about 0.04–50 eV. A one-dimensional fluid model and the drift-diffusion theory are used to describe the neon dielectric barrier discharge. The effect of the gas pressure on the properties of neon dielectric barrier discharge is presented for the cycle-averaged regime. It is shown that the particle densities, electric potential, and metastable atom density increase with the pressure. In addition, the surface charge concentration and the gap voltage increase as well.

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Section: Boundary Conditionsmentioning

confidence: 99%

Study of the Neon Dielectric Barrier Discharge on a Capacitively Coupled Radio Frequency at a Low Pressure with Metastable Atom Density: Effect of the Pressure

Bouchikhi¹

2022

Ukr. J. Phys.

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“…In addition to parallel-plate electrodes [17][18][19], hollow electrodes [20][21][22][23][24][25] are also frequently applied in RF and direct current (DC) discharges. With a hollow electrode, RF-CCPs can produce higher plasma density outside the cavity when a low frequency is utilized, which implies that plasma density enhancement effect exists in RF discharges with hollow electrodes [20][21][22][26][27][28]. Moreover, utilizing hollow electrodes with different shapes, uniform plasma density can be obtained and the film deposition quality can be improved [29][30][31].…”

Section: Introductionmentioning

confidence: 99%

“…For instance, electron density outside the cavity can be influenced by the pressure, magnetic field and electrode gap [28,38,40]. Furthermore, the shape, depth and diameter of the hollow electrode can also affect the magnitude of electron density outside the cavity [22,26,36]. However, the effect of these factors on the magnitude of electron density outside the cavity is not clear, which is important for the design of hollow electrodes and the modification of discharge conditions to improve plasma properties.…”

Section: Introductionmentioning

confidence: 99%

Plasma density enhancement in radio-frequency hollow electrode discharge

HE 贺,

(何锋),

(欧阳吉庭)

2024

Plasma Sci. Technol.

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The plasma density enhancement outside hollow electrodes in capacitively coupled radio-frequency (RF) discharges is investigated by a two-dimensional (2D) particle-in-cell/Monte-Carlo collision (PIC/MCC) model. Results show that the existence of plasma inside the cavity at the hollow electrode sheath fully collapsed phase is an essential condition for the plasma density enhancement outside hollow electrodes. In addition, the existence of the electron density peak at the orifice generated via the hollow cathode effect (HCE), which plays an important role in the density enhancement. It is also found that the radial plasma bulk width at the orifice affects the magnitude of the density enhancement, and narrow radial plasma bulk width at the orifice is not beneficial to obtain high-density plasma outside hollow electrodes. Higher electron density at the orifice, combined with larger radial plasma bulk width at the orifice, causes higher electron density outside hollow electrodes. The results also imply that the HCE strength inside the cavity cannot be determined by the magnitude of the electron density outside hollow electrodes.

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Parametric study on the DC microdischarge in a 90%Helium–10%Xenon gas mixture at intermediate pressure

Bouchikhi

2021

Indian J Phys

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Proposition of a new geometry of the electrodes in a particular discharge

Cited by 5 publications

References 14 publications

Study of the Neon Dielectric Barrier Discharge on a Capacitively Coupled Radio Frequency at a Low Pressure with Metastable Atom Density: Effect of the Pressure

Study of the Neon Dielectric Barrier Discharge on a Capacitively Coupled Radio Frequency at a Low Pressure with Metastable Atom Density: Effect of the Pressure

Plasma density enhancement in radio-frequency hollow electrode discharge

Parametric study on the DC microdischarge in a 90%Helium–10%Xenon gas mixture at intermediate pressure

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