Proposal for a hardness measurement technique without indentor by gas-cluster-beam bombardment

Insepov, Z.; Manory, Rafael R.; Matsuo, Jiro; Yamada, Isao

doi:10.1103/physrevb.61.8744

Cited by 56 publications

(33 citation statements)

References 37 publications

(61 reference statements)

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“…DOI: 10.1103/PhysRevLett.101.167601 PACS numbers: 79.20.Rf, 61.80.Jh, 61.82.Pv, 81.16.Rf Energetic atomic [1-3], molecular or cluster ions [4] impacting solids may leave tiny holes at the surface often surrounded by a raised region of displaced material. The observed surface morphology [1][2][3][4] is similar to what is found in ablation craters produced by an intense laser pulse [5,6], in macroscopic craters produced by meteorite impacts on planets [7], or by balls dropped into granular media [8], although their spatial scales may differ by about 17 orders of magnitude. Depending on the energy regime of the ions and the type of material being bombarded, the shape of the impact features and the underlying mechanisms of formation may differ [9,10].…”

supporting

confidence: 52%

“…Energetic atomic [1][2][3], molecular or cluster ions [4] impacting solids may leave tiny holes at the surface often surrounded by a raised region of displaced material. The observed surface morphology [1][2][3][4] is similar to what is found in ablation craters produced by an intense laser pulse [5,6], in macroscopic craters produced by meteorite impacts on planets [7], or by balls dropped into granular media [8], although their spatial scales may differ by about 17 orders of magnitude.…”

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confidence: 99%

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Direct Evidence for Projectile Charge-State Dependent Crater Formation Due to Fast Ions

et al. 2008

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We report on craters formed by individual 3 MeV=u Au q ini þ ions of selected incident charge states q ini penetrating thin layers of poly(methyl methacrylate). Holes and raised regions are formed around the region of the impact, with sizes that depend strongly and differently on q ini . Variation of q ini , of the film thickness and of the angle of incidence allows us to extract information about the depth of origin contributing to different crater features. DOI: 10.1103/PhysRevLett.101.167601 PACS numbers: 79.20.Rf, 61.80.Jh, 61.82.Pv, 81.16.Rf Energetic atomic [1-3], molecular or cluster ions [4] impacting solids may leave tiny holes at the surface often surrounded by a raised region of displaced material. The observed surface morphology [1][2][3][4] is similar to what is found in ablation craters produced by an intense laser pulse [5,6], in macroscopic craters produced by meteorite impacts on planets [7], or by balls dropped into granular media [8], although their spatial scales may differ by about 17 orders of magnitude. Depending on the energy regime of the ions and the type of material being bombarded, the shape of the impact features and the underlying mechanisms of formation may differ [9,10]. As the energy deposited by swift ions of equal kinetic energy, but different charge-states may vary substantially close to the surface, a detailed knowledge of charge-state dependent effects is of great importance for ion-beam based techniques of materials structuring (such as ion-track etching), particularly considering the new demands for smaller pattern sizes and the use of thinner layers [11]. Our results give direct evidence for a strong dependence of the surface modifications introduced by single fast ions on their charge state. For track-etching procedures, this means it is possible to control the etching sensitivity at the surface and charge equilibration below the surface should yield different etched shapes, dependent on the incident charge state. Moreover, by employing a series of well-defined nonequilibrium charge states, we could derive depth information on the near-surface effects induced by single fast ion impacts.In this Letter, we focus on cratering induced by high velocity ions. At specific kinetic energies of a few MeV per nucleon, such ions transfer more than 99% of their energy to the target-electron system. A considerable fraction of the energy deposited in the track of a swift heavy ion is concentrated in a core region ( % 1 nm), where ionizations are directly produced by the ions. Fast secondary electrons spread the rest of the energy over larger distances. The exact size of such regions depend on the material and on the velocity of the ions, while the total amount of energy loss per path length, S e ¼ dE e =dx, is well understood [12]. The subsequent electron dynamics, however, is a nonlinear phenomenon and it may result in large sputter yields and cratering, due to the coupling of electronic and atomic degrees of freedom [13][14][15]. For reviews on ion-induced electronic cratering pr...

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Direct Evidence for Projectile Charge-State Dependent Crater Formation Due to Fast Ions

et al. 2008

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“…14,15 A new hybrid model utilizing MD for the atoms in the central collision zone, and continuum mechanics and thermodynamics outside, has been proposed in a previous paper 16 and used for crater formation study in Ref. 17. In this model, a shock wave theory is used to establish the minimum size of the central zone, i.e., the location of the boundary between the volume where MD models atomic collisions and the outside, which is treated as continuum.…”

Section: A Simulation Modelmentioning

confidence: 99%

Craters on silicon surfaces created by gas cluster ion impacts

Allen¹,

Insepov

Fenner³

et al. 2002

Journal of Applied Physics

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Atomic force microscopy ͑AFM͒ and high-resolution transmission electron microscope ͑HRTEM͒ cross section imaging of individual gas cluster ion impact craters on Si͑100͒ and Si͑111͒ substrate surfaces is examined. The comparison between 3 and 24 kV cluster impacts from Ar and O 2 gas sources is shown. Results for low fluence (10 10 ions/cm 2 ) 24 kV Ar individual cluster impacts onto a Si͑100͒ and Si͑111͒ substrate surfaces are compared with hybrid molecular dynamics ͑HMD͒ simulations. A HMD method is used for modeling impacts of Ar n (nϭ135, 225͒ clusters, with energies of 24 -50 eV/atom, on Si͑100͒ and Si͑111͒ surfaces. On a Si͑100͒, craters are nearly triangular in cross section, with the facets directed along the close-packed ͑111͒ planes. The Si͑100͒ craters exhibit four-fold symmetry as imaged by cross-sectional HRTEM, and AFM top view, in agreement with modeling. In contrast, the shape of craters on a Si͑111͒ shows a complicated six-pointed shape in the modeling, while AFM indicates three-fold symmetry of the impact. The lower energy 3 kV individual cluster impacts reveal the same crater shape in HRTEM cross section for both Ar and O 2 gas clusters, but with shallower crater depth than for the higher-energy impacts. The kinetics of the Ar and O 2 crater impacts may explain the successful use of higher-energy cluster impacts for etching material of higher initial surface roughness followed by the lower-energy impacts as an effective finishing step to achieve smoother surfaces.

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“…However, surface roughness did not increase rapidly and seemed to saturate under large cluster bombardment. This result could be attributed to the difference in crater shape formed with each cluster ion bombardment [19] . Crater-like damage is formed on solid surface with energetic cluster ion bombardment because a large number of surface atoms are displaced and sputtered spherically.…”

Section: Methodsmentioning

confidence: 99%

The effects of cluster size on sputtering and surface smoothing of PMMA with gas cluster ion beams

Ichiki

Ninomiya

Seki

et al. 2011

Trans. Mat. Res. Soc. Japan

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We investigated the sputtering rate and surface morphology of polymethylmethacrylate (PMMA) samples bombarded with Ar cluster ion beam with selected energy of 12.5 eV/atom. The incident cluster energy range was 10-60 keV/ion. The incident cluster ion was selected before irradiation by using the time-of-flight (TOF) method. Both the sputtering rates and the average surface roughness increased rapidly with increasing incident cluster size under bombardment with small cluster ion. Under bombardment with large cluster ion, the average surface roughness does not increase rapidly, although sputtering rates increased nonlinearly. It suggests that a cluster ion beam with large size would be effective for high speed etching without roughing the surface.

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Proposal for a hardness measurement technique without indentor by gas-cluster-beam bombardment

Cited by 56 publications

References 37 publications

Direct Evidence for Projectile Charge-State Dependent Crater Formation Due to Fast Ions

Direct Evidence for Projectile Charge-State Dependent Crater Formation Due to Fast Ions

Craters on silicon surfaces created by gas cluster ion impacts

The effects of cluster size on sputtering and surface smoothing of PMMA with gas cluster ion beams

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