Proposal and simulation of a DC–110 GHz waveguide using metal shielding and three-dimensional extension structure

Abstract

In this paper, a waveguide with metal shielding and a three-dimensional extension component is proposed with frequencies up to 110 GHz. By increasing the relative area between the signal line and the ground plane vertically, the electromagnetic field is limited within the air-dielectric cavity. By embedding metal shielding strip arrays into silicon oxidation, conductor and dielectric losses can be reduced significantly. In addition, the algorithm which extracts the transmission characteristics of the waveguide based on the Z parameter matrix is implemented. Compared to the conventional coplanar waveguide (CPW) and CPW with metal shielding, the results demonstrate that the structure can achieve a large bandwidth with DC–110 GHz, while the transmission loss is 0.0765 dB mm−1 at 110 GHz, which is reduced by 19.7% and 9.9%, respectively. Moreover, the value of Q with the proposed structure can reach 37.528 at 110 GHz, which is increased by 92.7% and 37.7%, respectively.