Property Evaluation of Vapor Deposited TiN Film by the Analysis of Elastic Waves. 2nd Report. Film Strength Estimated by AE Source Inversion during Compressive Loading.

A new hybrid technique for studying the fracture mechanism and strength of hard thin film is developed. The technique utilizes acoustic emission (AE) data, corrosion potential fluctuation (CPF) data and finite element method (FEM) for Vickers indentation test. This method was applied to TiN film deposited by PVD method on four metallic substrates of austenitic stainless steel, carbon steel, forging steel and pure iron.We detected both the AE and CPF from equidistant ripple cracks or step-wise terraces produced outside of the indentation during loading in a buffer solution (H 3 PO 4 , pH 6.86). Characteristic potential fluctuations, termed as a RD-type CPF (rapid drop to active potential and gradual recovery) and strong AEs were simultaneously produced by Mode-I ripple cracks of the film. They were produced by film bending during the penetration of the pyramidal indenter. The number of ripple cracks observed during indentation agreed well with that of RD-type CPF. Detailed analysis indicated the generation of ripple cracks at a constant distance L c . The value of L c can be predicted by the RD-type CPF timing and the penetration rate of the indenter. Bending strength of the film was estimated by FEM using the L c value. Intrinsic strength of the TiN film, determined by subtraction of residual stress, was measured as 0.9-1.4 GPa. These values are almost constant independent of the substrate material and consistent with the reported strength of 1.2 GPa.

show abstract

Advanced indentation technique for strength evaluation of hard thin films

Yonezu

Cho

Ogawa

et al. 2006

Science and Technology of Advanced Materials

View full text Add to dashboard Cite

show abstract

scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.

Contact Info

hi@scite.ai

10624 S. Eastern Ave., Ste. A-614

Henderson, NV 89052, USA

Blog Terms and Conditions API Terms Privacy Policy Contact Cookie Preferences Do Not Sell or Share My Personal Information

Made with 💙 for researchers

Part of the Research Solutions Family.

Property Evaluation of Vapor Deposited TiN Film by the Analysis of Elastic Waves. 2nd Report. Film Strength Estimated by AE Source Inversion during Compressive Loading.

Cited by 1 publication

References 0 publications

Advanced indentation technique for strength evaluation of hard thin films

Advanced indentation technique for strength evaluation of hard thin films

Contact Info

Product

Resources

About