Properties of Sprayed Aluminum-Doped Zinc Oxide Films—A Review

Ravichandran, K.; Begum, N. Jabena; Snega, S.; Sakthivel, B.

doi:10.1080/10426914.2014.930961

Cited by 37 publications

(38 citation statements)

References 107 publications

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“…These compounds are preferred because they are cheap, highly soluble and decompose at suitable temperatures [10]. Similar results (ρ = 10 -1 -10 -3 Ωcm, T = 80-97%) have been obtained with different combinations of the aforementioned zinc and aluminium sources [5].…”

Section: Introductionsupporting

confidence: 64%

“…Zinc oxide (ZnO) is a suitable candidate for replacing ITO due to its low price, wide band gap of 3.27 eV, good electrical, optical properties and stability in a hydrogen plasma atmosphere [2,3]. Doped zinc oxide thin films can be applied as window layers in solar cells, electrical contacts in liquid crystals, sensors, optical coatings, transparent electrodes, light emitting diodes among other uses [4][5][6]. Doped zinc oxide thin film TCOs have been extensively studied as non-toxic and cheaper alternatives to ITO.…”

Section: Introductionmentioning

confidence: 99%

“…The best optical and electrical conductivity results are commonly achieved by doping ZnO with elements from the boron group (B, Al, Ga, In) which act as +3 oxidation state electron donors when substituting Zn 2+ [5,19]. Indium is the best dopant in terms of optical and electric properties and improved crystallinity of the (002) preferred orientation of doped ZnO thin films [10].…”

Section: Introductionmentioning

confidence: 99%

“…The most common zinc precursors for depositing ZnO thin films are zinc chloride, zinc acetate and zinc acetylacetonate [5]. Aluminium chloride, aluminium nitrate and aluminium acetylacetonate are the most used Al dopants for AZO spray deposition.…”

Section: Introductionmentioning

confidence: 99%

See 3 more Smart Citations

A comparative study on physical properties of Al-doped zinc oxide thin films deposited from zinc acetate and zinc acetylacetonate by spray pyrolysis

Eensalu¹,

Krunks²,

Gromyko³

et al. 2017

energetika

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Herein we present a comparative study on highly transparent, conductive aluminium-doped ZnO (AZO) thin films deposited by pneumatic spray pyrolysis (PSP) of a zinc acetate based solution and a zinc acetylacetonate based solution on soda lime glass. The structural, optical and electrical properties of the films were studied depending on aluminium content in the precursor solution and substrate temperature during deposition (Ts). The solution used to prepare AZO thin films contained 0.2 M zinc acetate or 0.2 M zinc acetylacetonate and aluminium acetylacetonate between 0-15 at.% [Al]/[Zn]. Substrate temperature was varied from 275 to 450 °C. Transmittance and reflectance spectra were recorded by UV-VIS-NIR spectroscopy. Resistivity, mobility and charge carrier density were determined by four point probe measurements in ambient conditions. According to X-ray diffraction analysis, AZO films are highly c-axis oriented until 2-3 at.% [Al]/[Zn] in the spray solution, depending on zinc precursor. Crystallite size is 25-30 nm for AZO films deposited at Ts 400 °C. All AZO films exhibited high average optical transmittance of 76-94% in the visible spectrum 400-800 nm wavelength range. Eg values ranged from 3.32 in undoped ZnO to 3.58 eV in in highly doped AZO films deposited from zinc acetylacetonate due to the formation of secondary AlO x phases. The lowest resistivities were obtained at Ts 400 °C for films deposited from zinc acetate, 3-7.

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Section: Introductionsupporting

confidence: 64%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

A comparative study on physical properties of Al-doped zinc oxide thin films deposited from zinc acetate and zinc acetylacetonate by spray pyrolysis

Eensalu¹,

Krunks²,

Gromyko³

et al. 2017

energetika

View full text Add to dashboard Cite

show abstract

“…Medidas de ponta quente confirmaram o tipo de portador obtido. 4 8,57x10 -2 Tipo n 395 1,42x10 3 5,63x10 -2 Tipo n 540 4,89x10 2 2,64x10 -2 Tipo n…”

Section: Caracterização Elétrica: Resistência De Folha Resistividadeunclassified

Filmes de óxido de zinco e nitreto de zinco depositados por magnetron sputtering com diferentes pressões de argônio, oxigênio e nitrogênio.

Damiani¹

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Selective Surface Treatment Using Atmospheric Ar Plasma Jet for Aluminum‐doped Zinc Oxide Based Transparent and Flexible Electronics

Lee,

Seo,

Kwon

et al. 2023

Adv Materials Inter

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Transparent and flexible electronics are emerging technologies with the potential to enable new applications. However, to ensure high‐performance transparent electronics, post‐processing such as thermal annealing and vacuum plasma treatment is necessary, which are difficult to apply to polymer‐based flexible substrates. This study analyzed the feasibility of applying selective Ar plasma jet treatment at atmospheric pressure to transparent flexible electronics. When atmospheric Ar plasma treatment is applied to transparent flexible aluminum‐doped zinc oxide (AZO), it showed a maximum 83.1% improvement in sheet resistance while maintaining a high transmittance performance, of over 70%. To verify the mechanism behind the surface treatment effect using atmospheric Ar plasma, comprehensive analyses are performed using atomic force microscopy, X‐ray diffraction, and X‐ray photoelectron spectroscopy, which confirmed that the effect is due to oxygen vacancy formation caused by ion bombardment and thermal diffusion. The application of atmospheric plasma treatment to a patterned transparent flexible AZO device resulted in a reduction in contact resistance, and it is confirmed that the performance improvement effects can be retained for >500 h by applying additional passivation.

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Properties of Sprayed Aluminum-Doped Zinc Oxide Films—A Review

Cited by 37 publications

References 107 publications

A comparative study on physical properties of Al-doped zinc oxide thin films deposited from zinc acetate and zinc acetylacetonate by spray pyrolysis

A comparative study on physical properties of Al-doped zinc oxide thin films deposited from zinc acetate and zinc acetylacetonate by spray pyrolysis

Filmes de óxido de zinco e nitreto de zinco depositados por magnetron sputtering com diferentes pressões de argônio, oxigênio e nitrogênio.

Selective Surface Treatment Using Atmospheric Ar Plasma Jet for Aluminum‐doped Zinc Oxide Based Transparent and Flexible Electronics

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