Properties of Sol–Gel Derived Thin Organoalkylenesiloxane Films

Nenashev, R. N.; Vishnevskiy, Alexey S.; Котова, Н. М.; Воротилов, К. А.

doi:10.1134/s002016851804009x

Cited by 6 publications

(1 citation statement)

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“…The k -value increases with the concentration of the bridging groups. The possible reasons are distortion of the regular ladder-like structure of MSSQ films with the reduction in porosity, increase in residual silanol groups’ concentration and change of volume polarizability (phenylene bridged films) [ 35 ]. This effect is most pronounced in the films with the 1,4-phenylene bridge.…”

Section: Resultsmentioning

confidence: 99%

Effects of Methyl Terminal and Carbon Bridging Groups Ratio on Critical Properties of Porous Organosilicate Glass Films

et al. 2020

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Organosilicate glass-based porous low dielectic constant films with different ratios of terminal methyl to bridging organic (methylene, ethylene and 1,4-phenylene) groups are spin-on deposited by using a mixture of alkylenesiloxane with organic bridges and methyltrimethoxysilane, followed by soft baking at 120–200 °C and curing at 430 °C. The films’ porosity was controlled by using sacrificial template Brij® L4. Changes of the films’ refractive indices, mechanical properties, k-values, porosity and pore structure versus chemical composition of the film’s matrix are evaluated and compared with methyl-terminated low-k materials. The chemical resistance of the films to annealing in oxygen-containing atmosphere is evaluated by using density functional theory (DFT). It is found that the introduction of bridging groups changes their porosity and pore structure, increases Young’s modulus, but the improvement of mechanical properties happens simultaneously with the increase in the refractive index and k-value. The 1,4-phenylene bridging groups have the strongest impact on the films’ properties. Mechanisms of oxidative degradation of carbon bridges are studied and it is shown that 1,4-phenylene-bridged films have the highest stability. Methylene- and ethylene-bridged films are less stable but methylene-bridged films show slightly higher stability than ethylene-bridged films.

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Section: Resultsmentioning

confidence: 99%