Properties of Ga2O3-doped ZnO Deposited by Using a Facing Target Sputtering System

Kim, Dong‐Young; Seo, S. M.; Kim, Mi-Sun; Bae, Kang; Sohn, Sunyoung; Park, Seoung–Hwan; Kim, Hwa-Min

doi:10.3938/npsm.61.187

New Physics: Sae Mulli

2011

DOI: 10.3938/npsm.61.187

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Properties of Ga2O3-doped ZnO Deposited by Using a Facing Target Sputtering System

Dong‐Young Kim¹,

S. M. Seo²,

Mi-Sun Kim³

et al.

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Properties of Ga2O3-doped ZnO Deposited by Using a Facing Target Sputtering System

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