Using transmission and scanning electron microscopy (EBIC mode) the influence of heat treatment on the structure and electrical activity of glide dislocations and microdefects in silicon is investigated. These types of defects are not detectable in EBIC micrographs in as‐grown samples but after annealing they give rise to a strong contrast due to gettering processes. In as‐grown crystals the microdefects are traceable by etching methods, only. During heat treatment the structure of the microdefects transforms into CuSi precipitate loop complexes. No evident precipitate formation could be detected at the glide dislocations.