Properties of an atmospheric pressure radio-frequency argon and nitrogen plasma

Moravej, M.; Yang, Xian-Jie; Barankin, Michael D.; Penelon, J.; Babayan, S E; Hicks, Robert F.

doi:10.1088/0963-0252/15/2/005

Cited by 144 publications

(76 citation statements)

References 48 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Titration with a flow-tube reactor is commonly applied as a reference source for calibration [20]. Recently it was shown that a titration scheme allows a spatially not resolved measurement of the atomic nitrogen concentration in the effluent of a similar discharge [21]. The results presented here are based on a TALIF calibration scheme with xenon as described in greater detail in [8].…”

Section: Two-photon Absorption Laser-induced Fluorescencementioning

confidence: 99%

Optical Diagnostics of Micro Discharge Jets

Gathen

Buck

Gans

et al. 2007

Contrib. Plasma Phys.

View full text Add to dashboard Cite

Micro plasmas operated at ambient pressure with dimensions of the confining geometry in the order of a few ten micrometers to a millimeter are actually in the focus of interest due to the broad regime of applicability they offer and due to a similarly broad range of open physical questions. Here we present optical measurements within the discharge core and the effluent region of an especially developed micro discharge jet. To get an understanding of the complex system of this discharge it is important to analyse transport phenomena of energy and particles within both parts of the discharge by various highly sophisticated diagnostics. As a consequence of the limited access and the dimensions of the micro discharge most of these diagnostics are optical. Here we present diagnostics applied to determine spatially resolved absolute atomic oxygen densities as the most reactive constituent of the effluent, density maps of ozone as final reaction product of the gas chemical chain induced by the discharge and phase resolved optical emission spectroscopy yielding insight into the excitation dynamics of the discharge.

show abstract

Section: Two-photon Absorption Laser-induced Fluorescencementioning

confidence: 99%

Optical Diagnostics of Micro Discharge Jets

Gathen

Buck

Gans

et al. 2007

Contrib. Plasma Phys.

View full text Add to dashboard Cite

show abstract

“…The details of the transport coefficients and chemical reactions can be found in Ref. 19. Figure 1 shows the spatio-temporal profiles of the electron impact ionization rate and electron power absorption in the dual-frequency Ar DBD plasma as a function of the applied low frequency voltage amplitudes (from V lf =100 V to V lf =500 V).…”

Section: All Article Content Except Where Otherwise Noted Is Licensmentioning

confidence: 99%

Electron heating and mode transition in dual frequency atmospheric pressure argon dielectric barrier discharge

et al. 2017

View full text Add to dashboard Cite

Plasma ionization, excitation, mode transitions and associated electron heating mechanisms in atmospheric pressure dielectric barrier discharges (DBD) driven by dual radio frequency sources are investigated in this paper. The electrons are found to be heated mainly by the high frequency component in the plasma bulk when discharged in α mode. On the contrary, the low frequency component is primarily responsible for heating in the sheath which is caused by intense motion in the sheath. It was also found that variation of the lower frequency component ratio could effectively modulate the electron energy distribution as determined from time averaged EEDF. The results above have demonstrated that the independent control of plasma parameters via non-linear synergistic effect between the dual frequency sources can be achieved through reasonable selection of processing parameters.

show abstract

“…Feed gas made of argon (or helium) and up to 0.1 vol% of other gases, flows between the electrodes at a rate of 20 up to 60 L/min. The gas emerges from the holes and impinges on a substrate placed 2 to 15 mm downstream, where cleaning or etching of surface material takes place [12].…”

Section: Fluid Dynamicsmentioning

confidence: 99%

“…Although there exists advanced experimental and modelling studies a complete picture of the physical and chemical processes determining the performance of this discharge is not obtained, yet. Most of the studies are on the gas breakdown [7][8][9], the transitions of the discharge from  to  mode [10,11] and the concentration of radicals in the afterglow [12,13].…”

Section: Introductionmentioning

confidence: 99%

Investigation of the gas flow effect on an atmospheric pressure RF plasma torch

Atanasova¹,

Mihailova²,

Carbone³

et al. 2011

J. Phys.: Conf. Ser.

View full text Add to dashboard Cite

Abstract.A cool atmospheric pressure non-thermal capactively-coupled RF discharge is studied. It is created between two parallel electrodes -a powered one supplied by 13.56 MHz, and a grounded one. The feed gas argon flows via holes between the electrodes where it is ionized. The plasma torch is studied by means of a time dependent two-dimensional fluid model. A simplified kinetic scheme with four active species is considered, namely argon excited atoms (Ar * ), atomic (Ar + ) ions, molecular (Ar 2 + ) ions and electrons (e). The plasma dynamics in the space between the electrodes as well as in the extended region behind the grounded electrode is studied. The effect of the gas flow on the plasma is examined. Constriction of the plasma is induced by the field sustaining the discharge due to the sieve-like structure of the electrodes. As a result of the stationary gas flow the filaments extend beyond the electrodes ensuring a flow of active species in the afterglow.

show abstract

Properties of an atmospheric pressure radio-frequency argon and nitrogen plasma

Cited by 144 publications

References 48 publications

Optical Diagnostics of Micro Discharge Jets

Optical Diagnostics of Micro Discharge Jets

Electron heating and mode transition in dual frequency atmospheric pressure argon dielectric barrier discharge

Investigation of the gas flow effect on an atmospheric pressure RF plasma torch

Contact Info

Product

Resources

About