Progresses on new generation laser direct writing technique

Wang, S.; Zhou, Zhang‐Lin; Li, B.; Wang, C.; Liu, Q.

doi:10.1016/j.mtnano.2021.100142

Cited by 29 publications

(23 citation statements)

References 107 publications

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“…It offers several advantages, including maskless operation, streamlined processing, cost‐effectiveness, and the ability to large‐area production. [ 203 ] Figure a displays the schematic setup of the two‐photon DLW technology. [ 204 ] LDW system has emerged as a promising technology for producing diverse and intricate micro/nanostructures in mechanical metamaterials.…”

Section: Micro/nanoscale Technologies In Mechanical Metamaterialsmentioning

confidence: 99%

Advanced Fabrication of Mechanical Metamaterials Based on Micro/Nanoscale Technology

Chen,

Lin,

Salehi

et al. 2023

Adv Eng Mater

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In recent years, mechanical metamaterials have shown good mechanical properties such as ultra‐lightness, programmable stiffness, and tunable Poisson’s ratio through clever structural design of microstructures. Micro/nanotechnology has been used to ensure mechanical metamaterials’ fabrication quality and performance for use as structural substrates in multifunctional applications. Mechanical metamaterials are intentionally engineered with periodic microstructures in diverse shapes, allowing for the creation of complex structural substrates. However, this sophisticated design poses significant challenges in the fabrication process, particularly at the micro/nanoscale level, where current technology hinders mechanical metamaterials’ performance improvement and function realization. This review explores the fabrication processes of mechanical metamaterials using micro/nanotechnology and showcase recent progress and future trends. Particular attention is given to recent development, challenges, and future trends in advanced fabrication technologies for mechanical metamaterials. This survey aims to explain why mechanical metamaterials have significant benefits and are well‐suited as structural substrates for multifunctional applications, what advanced fabrication technologies at the micro/nanoscale have been introduced to prepare mechanical metamaterials and how to overcome manufacturing technology bottlenecks of mechanical metamaterials in terms of synthesis, materials and design method.This article is protected by copyright. All rights reserved.

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Section: Micro/nanoscale Technologies In Mechanical Metamaterialsmentioning

confidence: 99%

Advanced Fabrication of Mechanical Metamaterials Based on Micro/Nanoscale Technology

Chen,

Lin,

Salehi

et al. 2023

Adv Eng Mater

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“…to prepare micromodels by directly removing materials on substrates (Figure 5) for many years. 25 Laser engraving does not require dangerous etchants, such as hydrofluoric acid, or heating of materials, 26,27 and it can be widely applied to many materials such as metals, polymers, ceramics, composites, semiconductors, diamond, graphite and glass. 28 The laser gases can be F 2 , ArF, KrF, XeCl, XeF and CO 2 , causing different laser wavelengths.…”

Section: Laser Engraving/ablation Laser Engraving Has Been Usedmentioning

confidence: 99%

“…30 However, the typical resolution of laser engraving is in size of micrometers due to its diffraction limitation, which is not able to provide high accuracy of channels. Recently, it has been reported that New-Ge laser direct writing can improve the resolution to the nano-scale, 25 but it has not been applied in the oil and gas research yet.…”

Section: Laser Engraving/ablation Laser Engraving Has Been Usedmentioning

confidence: 99%

Fabrications and Applications of Micro/Nanofluidics in Oil and Gas Recovery: A Comprehensive Review

et al. 2022

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Understanding fluid flow characteristics in porous medium, which determines the development of oil and gas oilfields, has been a significant research subject for decades. Although using core samples is still essential, micro/nanofluidics have been attracting increasing attention in oil recovery fields since it offers direct visualization and quantification of fluid flow at the pore level. This work provides the latest techniques and development history of micro/nanofluidics in oil and gas recovery by summarizing and discussing the fabrication methods, materials and corresponding applications. Compared with other reviews of micro/nanofluidics, this comprehensive review is in the perspective of solving specific issues in oil and gas industry, including fluid characterization, multiphase fluid flow, enhanced oil recovery mechanisms, and fluid flow in nano-scale porous media of unconventional reservoirs, by covering most of the representative visible studies using micro/nanomodels. Finally, we present the challenges of applying micro/nanomodels and future research directions based on the work.

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“…Heat-mode lithography involves resist and the lithographic method. So far, different lithographic techniques have been proposed including scanning probe lithography [2] , electron-beam lithography [3] , and direct laser writing [4] . Among others, direct laser writing is promising in micro/nano fabrications because of its relatively high speed and facile operation (that is, operated in air) [4][5][6][7] .…”

Section: Introductionmentioning

confidence: 99%

AgGeSbTe thin film as a negative heat-mode resist for dry lithography

Chen

Wang

et al. 2022

Chin. Opt. Lett.

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An AgGeSbTe thin film is proposed as a negative heat-mode resist for dry lithography. It possesses high etching selectivity with the etching rate difference of as high as 62 nm/min in CHF 3 =O 2 mixed gases. The etched sidewall is steep without the obvious lateral corrosion. The lithographic characteristics and underlying physical mechanisms are analyzed. Besides, results of X-ray diffraction, Raman spectroscopy, and X-ray photoelectron spectroscopy further indicate that laser irradiation causes the formation of Ge, Sb, and AgTe crystals, which is the basis of etching selectivity. In addition, the etching selectivity of Si to AgGeSbTe resist is as high as 19 at SF 6 =Ar mixed gases, possessing good etching resistance. It is believed that the AgGeSbTe thin film is a promising heat-mode resist for dry lithography.

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Progresses on new generation laser direct writing technique

Cited by 29 publications

References 107 publications

Advanced Fabrication of Mechanical Metamaterials Based on Micro/Nanoscale Technology

Advanced Fabrication of Mechanical Metamaterials Based on Micro/Nanoscale Technology

Fabrications and Applications of Micro/Nanofluidics in Oil and Gas Recovery: A Comprehensive Review

AgGeSbTe thin film as a negative heat-mode resist for dry lithography

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