Progress towards the integration of optical proximity correction and directed self-assembly of block copolymers with graphoepitaxy

Liu, Chi‐Chun; Pitera, Jed W.; Lafferty, Neal; Lai, Kafai; Rettner, Charles; Tjio, Melia; Arellano, Noel; Cheng, Joy Y.

doi:10.1117/12.916525

Cited by 19 publications

(15 citation statements)

References 8 publications

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“…Several recent experimental studies successfully demonstrated the capability of DSA to produce cylindrical domains within larger guiding holes . Using a 70:30 poly(styrene‐ b ‐methylmethacrylate) (PS‐ b ‐PMMA with M n = 46.1 kg/mol for PS and M n = 21 kg/mol for PMMA) confined inside guiding templates with a CD of 51 nm, Yi et al produced contact holes with a diameter of 15 nm and a registration accuracy of 1 nm.…”

Section: Introductionmentioning

confidence: 99%

Self‐consistent field theory investigation of directed self‐assembly in cylindrical confinement

Laachi

Delaney

Kim

et al. 2014

J Polym Sci B Polym Phys

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We use self‐consistent field theory to study the self‐assembly of cylinder‐forming diblock copolymers confined in a cylindrical prepattern. This situation arises in contact holes—the hole shrink problem—where the goal is to produce a cylindrical hole with reduced dimensions relative to a guiding prepattern. In this study, we focus on systems with a critical prepattern dimension ranging from 50 nm to 100 nm that consequently lead to the formation of a single cylinder in the middle of the hole. We find that a variety of defect morphologies arise from the self‐assembly process and are strongly governed by the prepattern dimensions, wetting conditions as well as the polymer molecular weight. We also consider blends of diblock copolymers and homopolymers and determine optimal blending configurations that not only favor the formation of the desired cylindrical morphology but also extend the processing window relative to the pure diblock case. When defective structures form inside the prepattern, we compute their formation energy and use the string method to examine the kinetic pathways for the transition from the defective state to the perfect cylindrical state. © 2014 Wiley Periodicals, Inc. J. Polym. Sci., Part B: Polym. Phys. 2015, 53, 142–153

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Section: Introductionmentioning

confidence: 99%

Self‐consistent field theory investigation of directed self‐assembly in cylindrical confinement

Laachi

Delaney

Kim

et al. 2014

J Polym Sci B Polym Phys

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“…While several recent experimental studies [8][9][10] successfully demonstrated the capability of DSA to produce cylindrical domains within larger guiding holes, DSA for non-cylindrical contact holes has received little attention. Extensive studies of the large parameter spaces encountered in both cylindrical and non-cylindrical VIA lithography are still to be carried out.…”

Section: Introductionmentioning

confidence: 99%

The Hole Shrink Problem: Directed Self-Assembly Using Self-Consistent Field Theory

Iwama

Laachi²,

Delaney³

et al. 2013

J. Photopol. Sci. Technol.

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We use self-consistent field theory (SCFT) to study the self-assembly of diblock copolymers confined in cylindrical and non-cylindrical prepatterns. This situation arises in contact holes -the hole shrink problem-where the goal is to produce a contact hole with reduced dimensions relative to a guiding prepattern. In this study, we focus on systems with a critical dimensions (CD) ranging from ~50nm to ~100nm leading to the formation of a single PMMA domain in the middle of the holes. We found that different morphologies arise from the self-assembly process and are strongly governed by the prepattern dimensions, wetting conditions, shape of prepatten as well as the polymer molecular weight. We also considered blends of diblock copolymers and homopolymers and determined optimal blending configurations that not only favor the formation of the desired cylindrical morphology but also extend the processing window relative to the pure diblock case in cylindrical confinements.

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“…Beyond hole shrink, interest in DSA also lies in contact multiplication by producing several cylinders at desired locations within a single guiding templates. An example of such a situation and the subject of this study, includes elongated templates where single rows of multiple cylinders can self-assemble and produce VIAs with reduced CD and pitch [12][13] . We use three-dimensional self-consistent field theory (SCFT) simulations to investigate the detailed structure of the microdomain ordering and the factors leading to cylindrical morphologies in contact holes [14][15] .…”

Section: Introductionmentioning

confidence: 99%

Field-Theoretic Simulations of Multi-Cylinder Configurations in VIA Lithography

Laachi¹,

Iwama²,

Delaney³

et al. 2014

J. Photopol. Sci. Technol.

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Progress towards the integration of optical proximity correction and directed self-assembly of block copolymers with graphoepitaxy

Cited by 19 publications

References 8 publications

Self‐consistent field theory investigation of directed self‐assembly in cylindrical confinement

Self‐consistent field theory investigation of directed self‐assembly in cylindrical confinement

The Hole Shrink Problem: Directed Self-Assembly Using Self-Consistent Field Theory

Field-Theoretic Simulations of Multi-Cylinder Configurations in VIA Lithography

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