Progress of nanopositioning stages development for hard x-ray nanofocusing and coherence preservation optics at the APS

Abstract

Abstract. Customized flexure mechanisms and precision thermal expansion compensation are needed for the development of nanopositioning stages for hard x-ray nanofocusing and coherence preservation optics at the APS. Recent progress of such stage development is summarized in this paper, which includes: stages designed for alignment apparatus for K-B mirrors with 20 -50 nm focal spot; alignment apparatus for six Fresnel zone plates stacking with 20 nm focal spot; stages for switchable multiple nanofocusing system; UHV hard x-ray monochromators for coherence related applications; and four-crystal hard x-ray split-and-delay line with coherence preservation. Preliminary test results for mechanical performance of these nanopositioning stages are also discussed in this paper.