Progress in the non-equilibrium vibrational kinetics of hydrogen in magnetic multicusp H− ion sources

Atom and Ion Chemistry in Low Pressure Hydrogen DC Plasmas

“…27,31,48 For computational purposes, most of the electron-driven rate coefficients have been fitted when possible to the convenient expression k i ) a × T e b × exp(c/T e )) cm 3 s -1 . The expressions for k 9 , k 11 , and k 12 are more cumbersome than those for k i (i ) 1, ..., 8, and 13) but are also listed in Table 1. In all cases, the electron-impact rate coefficients have been calculated under the assumption that the free plasma electrons follow a Maxwellian electron energy distribution.…”

“…Many studies have also been devoted to the atomic hydrogen produced in these plasmas, which is of relevance for film deposition processes. [5][6][7][8] The dynamics of internally excited states of H 2 [9][10][11][12][13][14][15][16][17][18] and its close relationship to the production of H -ions by dissociative electron attachment have been also addressed by various groups. [19][20][21] Theoretical and experimental investigations over decades have provided much information on fundamental processes relevant to H 2 plasmas (see for instance refs 22-27 and references therein), but there is still a dearth of basic data specially on state-resolved cross sections and on gas surface interactions, and many uncertainties remain about the coupling between the plasma chemistry and the discharge dynamics.…”

Vibrational Population of Hydrogen Molecules Excited by an RF Discharge in an Expanding Thermal Arc Plasma as Determined by Emission Spectroscopy

“…Those differences at the gas temperatures To = 1200-1400 K reach two orders of magnitude) [40]. That fact and also significant differences in the pressures might be as one of the explanations of the differences between the results of various authors on vibrational distribution of hydrogen molecules in low-temperature plasmas.…”

Rovibrational distribution of H2 in low temperature plasma: the dependence on the plasma parameters

“…The v-t relaxation occurred among the molecules and hydrogen atoms can be found in Gorse [14]. For the vibrational translational exchange, we only consider hydrogen molecules and atoms because they are the main heavy species in most of the divertor plasmas.…”

“…Necessary electron energy extrapolation was made to get the reaction rate coefficients. For the transition v-w (v > 0, w > v), we utilize the scaling law suggested by C. Gorse [14],…”