“…Light Detection and Ranging (LIDAR) has been rapidly developing in uncrewed vehicles, robotics, image recognition, and medical care to create Smart City in recent years [1,2]. An integrated optical waveguide phased array (OPA) [3,4] chip is the most promising solution for all-solid-state [5], miniaturized LIDAR [6], which has been successfully applied in beam scanning, distance detection, and chip-level optical communication [7]. LIDAR with silicon-based OPA has been widely studied [3,4,8,9], because of its high sensitivity, long range, high interference immunity, compatibility with CMOS processes, and low price.…”