Progress and perspectives in dry processes for emerging multidisciplinary applications: how can we improve our use of dry processes?

Abstract

The non-thermal nature of chemical reactions in plasma chemistry is considered to be suitable for next-generation energy production from plasma-material syntheses and renewable sources. As emerging multidisciplinary applications, plasma medicine and plasma agriculture are currently topical applications that make use of atmospheric pressure plasmas. Here, we conduct a systematic review of the literature over the last 40 years to evaluate the history and progress of dry processes with regard to atmospheric pressure plasma technologies as well as material synthesis and thin-film deposition. In this review, selected breakthroughs are reviewed. Finally, near-future major challenges are addressed to encourage new multidisciplinary research across the plasma science and technology community.

Functional nitrogen science based on plasma processing: quantum devices, photocatalysts and activation of plant defense and immune systems

“…144) However, the associated mechanisms have not been assessed comprehensively. The applications of plasmas in agriculture have been reviewed elsewhere 145,146) and cover a wide range of research areas, including utilization during harvesting 47) and post-harvest 147) as well as in the food supply chains. 148) 5.…”

Review and future perspective of feature scale profile modeling for high-performance semiconductor devices

“…Considering deposition processes, 10 – 14 it is important to achieve both good coverage and film properties such as the density, permeability, and adhesion even under the different ARs based on ground materials. Because various types of materials, such as poly-Si, SiO2, SiN, and metals, are stacked with organic films, a deposition process with low temperature ≦100°C is required.…”

Enhancement of ethanol production and cell growth in budding yeast by direct irradiation of low-temperature plasma

“…Low-temperature plasma (LTP) has been widely used in medicine and agriculture. [1][2][3][4][5][6][7] Indirect plasma treatments such as plasma-activated medium (PAM) as well as direct plasma treatments have broadened the ways to apply the LTP. [8][9][10][11] Since reaction products among LTP and solutions play some roles on physiological responses, indirect plasma treatments are important, however, the effects by UV/VUV and direct interactions between short-lived reactive species and biological surface are brought by direct plasma treatments.…”