“…Fortunately, the metasurface emerges as a novel planar device with periodic arrangements of subwavelength meta‐atoms that can be exploited for various terahertz functionalities, including frequency filtering, [ 8 ] focusing, [ 9,10 ] phase control, [ 11,12 ] beam steering, [ 13,14 ] and polarization conversion. [ 15 ] Since the proposal of the pioneering work combining semiconductors with metal metasurfaces, [ 16 ] dynamic terahertz modulation using optical, [ 17,18 ] electrical,, [ 19 ] thermal, [ 20 ] magnetic, [ 21 ] and mechanical [ 22,23 ] methods have been vigorously developed. The dynamically tunable nature overcomes the drawbacks of passive metasurfaces in immutable size, greatly enriching the versatility of terahertz devices based on metasurfaces.…”