Programmable Silicon Nitride Photonic Integrated Circuits

Tian, Hao; Attanasio, Alaina; Siddharth, Anat; Voloshin, Andrey S.; Snigirev, Viacheslav; Lihachev, Grigory; Bancora, Andrea; Shadymov, Vladimir; Wang, Rui N.; Riemensberger, Johann; Kippenberg, Tobias J.; Bhave, Sunil A.

doi:10.1109/mems49605.2023.10052328

2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS) 2023

DOI: 10.1109/mems49605.2023.10052328

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Programmable Silicon Nitride Photonic Integrated Circuits

Hao Tian

Alaina Attanasio

Anat Siddharth

et al.

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