Programmable setup for Peltier element control with fine smooth regulation of the temperature about testing of semiconductor structures

Andreev, Svetozar; Bobev, Stefan Rumenov; Aleksandrova, Mariya; Videkov, Valentin

doi:10.1109/et.2016.7753453

Cited by 6 publications

(4 citation statements)

References 7 publications

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“…Figure 3 shows the wiring diagram of the thermal chamber and its connection with the Arduino ® board, in this case, an Arduino ® UNO board. Cell power is controlled using the Pulse Width Modulation [23,24] technique (PWM), which allows to turn the power on and off very quickly. Since the PWM resolution of Arduino board is only 8 bit (255 values), we chose a 12 bit (4095) external PWM generator board, based on PCA9685 chip, that should improve the behavior of the cell.…”

Section: The Thermal Chamber Prototypementioning

confidence: 99%

A Low-Cost Chamber Prototype for Automatic Thermal Analysis of MEMS IMU Sensors in Tilt Measurements Perspective

Ruzza

Guerriero

Revellino

et al. 2019

Sensors

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In this work, a low-cost, open-source and replicable system prototype for thermal analysis of low-cost Micro Electro-Mechanical Systems (MEMS) Inertial Measurement Unit (IMU) sensors in tilt measurement perspective is presented and tested. The system is formed of a 3D printed frame, a thermal cell consisting in a Peltier element mounted over a heat sink, and a control and power system. The frame is designed to allow the independent biaxial tilting of the thermal cell through two servomotors. The control board is formed by an Arduino® and a self-made board including a power drive for controlling the thermal unit and servomotors. We tested the chamber analyzing the behavior of multiple MEMS IMU onboard accelerometers suitable for measuring tilt. Our results underline the variability of the thermal behavior of the sensors, also for different sensor boards of the same model, and consequently the need for the adoption of a thermal compensation strategy based on thermal analysis results. These data suggesting the need for the analysis of the thermal behavior of MEMS-based sensors, indicate the potential of our system in making low-cost sensors suitable in medium-to-high precision monitoring applications.

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Section: The Thermal Chamber Prototypementioning

confidence: 99%

A Low-Cost Chamber Prototype for Automatic Thermal Analysis of MEMS IMU Sensors in Tilt Measurements Perspective

Ruzza

Guerriero

Revellino

et al. 2019

Sensors

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show abstract

“…The measurements were realized using a Peltier based heating-cooling system with a smooth regulation of the temperature. A detailed description of the measurement technique and setup can be found elsewhere [ 15 ]. A comparison between single polymer-based pyroelectric device and composite BST/PVDF-TrFE device was done.…”

Section: Methodsmentioning

confidence: 99%

Pyroelectric Properties of BaxSr(1−x)TiO3/PVDF-TrFE Coating on Silicon

et al. 2021

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Bilayer coatings of barium strontium titanate (BaxSr(1−x)TiO3)/poly [(vinylidenefluoride-co-trifluoroethylene] (PVDF-TrFE) were integrated on silicon Si (100) for pyroelectric devices. Pyroelectric properties of the composite were determined for different electrode materials (silver and aluminum) and different electrodes configurations creating an electric field in parallel and in-plane direction in the ferroelectric coating. For this purpose, parallel-plate and planar interdigital capacitors were fabricated. Anisotropy in the pyroelectric response was noted for the different directions of the measured electrical potential. The dynamic method was used to evaluate the pyroelectric properties in the temperature range of 22 to 48 °C. Pyroelectric response with a higher value was observed at the one plate’s configuration of interdigital electrodes. The voltage response was the strongest when silver contacts were used. At temperatures near room temperature, the voltage increased by 182 µV at resolution of 7 µV/°C for the in-plain device configuration, vs. 290 µV at a resolution of 11 µV/°C for the out-of-plain configuration. A relationship between the surface morphology of the ferroelectric oxide and oxide/polymer coating and the pyroelectric voltage was also found, proving the smoothening effect of the introduction of polymer PVDF-TrFE over the BaSrTiO3 grains.

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“…Figure 6 shows the wiring diagram of the thermal chamber and its connection with the Arduino ® board, in this case, an Arduino ® Mega 2560 board ( ). Cell power is controlled using Pulse Width Modulation [ 35 , 36 ] technique (PWM), which allow to turn power on and off the device very quickly. Power modulation occurs through the ENA input pin of the L298N driver, while current flux direction is controlled by the IN1 and IN2 input pins as shown in Figure 6 .…”

Section: Methodsmentioning

confidence: 99%

Thermal Compensation of Low-Cost MEMS Accelerometers for Tilt Measurements

Ruzza

Guerriero

Revellino

et al. 2018

Sensors

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Low-cost MEMS accelerometers have the potential to be used in a number of tilt-based monitoring applications but have the disadvantage of being very sensitive to temperature variation (thermal drift). In this paper, we analyze the thermal behavior of a low-cost sensor in the range −10 to +45 °C in order to provide a simple compensation strategy to mitigate this problem. For sensor analysis, we have developed a miniaturized thermal chamber, which was mounted on a tilting device to account for tilt angle variation. The obtained raw data were used to construct low degree polynomial equations that by relating the measurement error induced by thermal drift (i.e., acceleration residuals) to temperature and inclination (of each specific axis), can be used for thermal compensation. To validate our compensation strategy, we performed a field monitoring test and evaluated the compensation performance by calculating RMS errors before and after correction. After compensation, the RMS errors calculated for both the X and Y axes decreased by 96%, indicating the potential of using a simple set of equations to solve common drawbacks that currently make low-cost MEMS sensors unsuitable for tilt-based monitoring applications.

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Programmable setup for Peltier element control with fine smooth regulation of the temperature about testing of semiconductor structures

Cited by 6 publications

References 7 publications

A Low-Cost Chamber Prototype for Automatic Thermal Analysis of MEMS IMU Sensors in Tilt Measurements Perspective

A Low-Cost Chamber Prototype for Automatic Thermal Analysis of MEMS IMU Sensors in Tilt Measurements Perspective

Pyroelectric Properties of BaxSr(1−x)TiO3/PVDF-TrFE Coating on Silicon

Thermal Compensation of Low-Cost MEMS Accelerometers for Tilt Measurements

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