We present template-based microscale self-assembly as a technique that promotes the electronics industry's initiative towards functional diversification and function densification, demonstrating that our process can improve existing assembly and packaging techniques, and also enable possibilities restricted by current industry methodologies. We first present foundational work that performs part (370 × 370 × 150 µm3) delivery to receptor sites (20 × 10 array) with a stochastic batch delivery process that completes within tens of seconds. The delivery mechanism is statistically characterized and a chemical kinetics inspired model is developed. Based on this understanding, repeatable and programmable 100% yield assembly is achieved in open-loop and feedback-based configurations. The established methodology is adapted to deliver and assemble standard 01 005 format (0.016″ × 0.008″, 0.4 mm × 0.2 mm) monolithic ceramic capacitors and thin-film resistors onto silicon substrates. This process is CMOS compatible and is competitive with capacitors and resistors fabricated through standard foundry processes.