Abstract-Due to the manufacturing process, the shrinking of electronic devices will inevitably introduce a growing number of defects and even make these devices more sensitive to external influences. It is, therefore, likely that the emerging nanometer-scale devices will eventually suffer from more errors than classical silicon devices in large scale integrated circuits. In order to make systems based on nanometer-scale devices reliable, the design of fault-tolerant architectures will be necessary. Initiated by von Neumann, the NAND multiplexing technique, based on a massive duplication of imperfect devices and randomized imperfect interconnects, had been studied in the past using an extreme high degree of redundancy. In this paper, this NAND multiplexing is extended to a rather low degree of redundancy, and the stochastic Markov nature in the heart of the system is discovered and studied, leading to a comprehensive fault-tolerant theory. A system architecture based on NAND multiplexing is investigated by studying the problem of the random background charges in single electron tunneling (SET) circuits. Our evaluation shows that it might be a system solution for an ultra large integration of highly unreliable nanometer-scale devices.