Profile Estimation of Linear Slide in the Presence of Straightness, Yawing and Rolling Motion Errors

Abstract

This paper presents a novel measurement system for the on-machine estimation of the profiles of a linear slide in the presence of three motion errors, i.e. straightness, yawing and rolling. The system consists of eight displacement sensors, a mounting stage and a data acquisition system. The Fourier Eight Sensor (F8S) method is employed for the error separation with software programs written in MATLAB codes. A prototype is designed, built and fitted to an axis of the precision slide. Experiments are performed to test the repeatability of the profile results under three different slide speeds. Results confirm that the proposed measurement system is capable of determining the profiles with good repeatability in the presence of straightness, yaw and roll errors of the slide.