Production of copper vapor in a pulsed hollow cathode discharge

A description of metal-vapour production in a hollow-cylindrical magnetron sputtering discharge

“…To examine the predictions given by the model, experiments have been done in a copper hollow-cylindrical magnetron. The density of copper atoms sputtered from the cathode was measured with an absorption method [13]. In the measurement [14], two sets of identical magnetrons were placed in tandem.…”