Production of carbon nanotubes by controlling radio-frequency glow discharge with reactive gases

Satake, N.; Jeong, Goo‐Hwan; Hirata, Takamichi; Hatakeyama, Rikizo; Ishida, Hiroyasu; Tohji, Kazuyuki; Motomiya, Kenichi

doi:10.1016/s0921-4526(02)01025-6

Cited by 19 publications

(8 citation statements)

References 3 publications

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“…The lower active species density away from the plasma zone may be conducive to growing SWCNTs [109,116,117]. One variation of the capacitively coupled system involves introduction of a magnetic field near the powered electrode which increases the electron density locally through the E × B field [100][101][102][103][104][105][106][107][108]. This field keeps the electrons in a spiral loop above the wafer, thus increasing the ionization efficiency and maintaining a high plasma density.…”

Section: Pecvd Reactorsmentioning

confidence: 99%

A review of plasma enhanced chemical vapour deposition of carbon nanotubes

Meyyappan

2009

J. Phys. D: Appl. Phys.

214

152

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Plasma enhanced chemical vapour deposition (PECVD) has been widely discussed in the literature for the growth of carbon nanotubes (CNTs) and carbon nanofibres (CNFs) in recent years. Advantages claimed include lower growth temperatures relative to thermal CVD and the ability to grow individual, free-standing, vertical CNFs instead of tower-like structures or ensembles. This paper reviews the current status of the technology including equipment, plasma chemistry, diagnostics and modelling, and mechanisms. Recent accomplishments include PECVD of single-walled CNTs and growth at low temperatures for handling delicate substrates such as glass.

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Section: Pecvd Reactorsmentioning

confidence: 99%

A review of plasma enhanced chemical vapour deposition of carbon nanotubes

Meyyappan

2009

J. Phys. D: Appl. Phys.

214

152

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“…Yen et al [89] prepared aligned MWCNTs fully filled with Fe, Co, and Ni by ICP-CVD using nanowires as catalysts. A modified RF-PECVD system, namely magnetically enhanced RF-PECVD system [90], is also used for CNT synthesis. This system proficiently felicitates gas ionization in a magnetron-type PECVD reactor.…”

Section: Radio Frequency Plasma-enhanced Chemical Vapor Deposition (R...mentioning

confidence: 99%

Carbon Nanotube Fabrication at Industrial Scale

Sengupta¹

2018

Handbook of Nanomaterials for Industrial Applications

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“…Moreover, a series of variations have been experimented on by coupling different sources. [38][39][40] In this context DC enhanced hot-filament, magnetically enhanced RF, and inductively coupled plasma reactors are presently being used in many laboratories. The use of DC-, RF-, or MW-enhanced CVD in some cases makes it possible to achieve deposits with rather high nanotube yields (up to 50 %), at relatively low temperatures.…”

Section: Plasma-enhanced Cvdmentioning

confidence: 99%

The World of Carbon Nanotubes: An Overview of CVD Growth Methodologies

Terranova

Sessa

Rossi

2006

Chemical Vapor Deposition

118

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Carbon nanotubes are a new form of completely artificial crystalline carbon, which have never been found as a natural form. These fascinating hollow cylinders can be considered as prototypes of one-dimensional quantum wires, exhibit peculiar chemical-physical properties very different from those of other C-based nanostructures, and are envisaged to have potential in a wide range of applications. This review examines some of the most interesting CVD methodologies employed for the synthesis of carbon nanotubes. The results obtained from different methodologies demonstrate that carbon nanotubes can be grown by CVD under a wide range of experimental conditions, permitting flexible, tunable synthesis. Overall, in the last few years, CVD approaches have emerged as the most promising among those proposed for synthesizing carbon nanotubes.

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Production of carbon nanotubes by controlling radio-frequency glow discharge with reactive gases

Cited by 19 publications

References 3 publications

A review of plasma enhanced chemical vapour deposition of carbon nanotubes

A review of plasma enhanced chemical vapour deposition of carbon nanotubes

Carbon Nanotube Fabrication at Industrial Scale

The World of Carbon Nanotubes: An Overview of CVD Growth Methodologies

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