2000
DOI: 10.1063/1.371825
|View full text |Cite
|
Sign up to set email alerts
|

Production of amorphous zones in GaAs by the direct impact of energetic heavy ions

Abstract: The damage produced in GaAs by implantation with low energy heavy ions has been studied as a function of ion mass and implantation temperature (30 and 300 K). The experiments were performed in situ in the microscope-accelerator facility at Argonne National Laboratory. In samples implanted and examined at 30 K, spatially isolated amorphous regions were produced by the direct impact of 50 keV Ar, Kr, and Xe ions. The probability that the impact of an individual ion formed an amorphous zone increased as the ion m… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1
1
1
1

Citation Types

2
16
0

Year Published

2001
2001
2020
2020

Publication Types

Select...
6
3
1

Relationship

0
10

Authors

Journals

citations
Cited by 41 publications
(18 citation statements)
references
References 22 publications
2
16
0
Order By: Relevance
“…The results indicate an enhancement of irradiation effect for heavier ions, and are consistent with previous results 22. For further discussion, more experimental studies are required.The reason of these phenomena is the irradiated ion enlarged kinetic energy, then irradiate ions can induce larger number of defect atoms.…”
supporting
confidence: 92%
“…The results indicate an enhancement of irradiation effect for heavier ions, and are consistent with previous results 22. For further discussion, more experimental studies are required.The reason of these phenomena is the irradiated ion enlarged kinetic energy, then irradiate ions can induce larger number of defect atoms.…”
supporting
confidence: 92%
“…BCA calculations do not have a mechanism to predict amorphization, but MD simulations can predict amorphous zones. The production of amorphous zones has been observed experimentally as a result of irradiation by protons and other ions [35][36][37][38][39]. The production of amorphous zones has also been seen previously in molecular dynamics simulations.…”
Section: Amorphous Zone Productionsupporting
confidence: 72%
“…This kind of energy transfer does not normally lead to atom displacements but may damage the target due to beam-stimulated local chemical reactions. [108][109][110][111] The cross sections of both nuclear and electron scattering decreases with increasing electron energy. Both electron and ion beams can be focused onto an area of several nanometers ͑and even down to 0.6 Å in some TEMs͒, which makes it possible to create defects in predetermined areas of the sample.…”
Section: A Production Of Defects In Bulk Targetsmentioning
confidence: 99%