Production high-energy ion implanters with milliampere beam capabilities

Boisseau, P.; Dart, A.; Denholm, A. S.; Glavish, H.F.; Libby, Bruce; Simcox, G. K.

doi:10.1016/0168-583x(89)90254-1

Nuclear Instruments and Methods in Physics Research Section B:

1989

DOI: 10.1016/0168-583x(89)90254-1

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Production high-energy ion implanters with milliampere beam capabilities

P. Boisseau

A. Dart²,

A. S. Denholm

et al.

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Production high-energy ion implanters with milliampere beam capabilities

Cited by 1 publication

References 2 publications

Initial performance results from the NV1002 high energy ion implanter

Initial performance results from the NV1002 high energy ion implanter

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