“…[13][14][15] A wide range of possible uses makes transition metal clusters of great interest. 2,5,8,9,18 Changes in nanocluster nucleation and growth are influenced through modifying the process parameters such as Ar flow rate (f Ar ), He flow rate (f He ), sputter source ion current (SC), and aggregation length (L). 16,17 In this study, PGC is utilized to produce Nb nanoclusters using a Nanogen 50 nanoparticle source from Mantis Deposition, Ltd. (Fig.…”