Product development of a MEMS optical scanner for a laser scanning microscope

Abstract

ABSTRAm Scan angle [ deg] Scan angle flucluation [%I]A h4EMS electromagnetic optical scanner for horizontal scanning in a laser scanning microscope has btxn developed. Although few MEMS actuators have been commercialized to date, it has successfully satisfied all the specifications including not only the fundamentals such as resonant fiquency and maximum scan angle but also the ones for the commercial produd such as scanning stability and reliability. It will be commercialized as a part of our product, OLSll00 (Fig. l), in the second half of FY 2001.2.1 -16 (changeable)

Free-Space Optical MEMS

“…Miyajima et al at Olympus [52] have developed MEMS 1-D scanners (mirror size ~4.2 × 3.0 mm 2 ) for insertion into a commercial laser-scanning confocal microscope. Their MEMS scanners ( Fig.…”