Processing of printed piezoelectric microdisks: effect of PZT particle sizes and electrodes on electromechanical properties

Santawitee, Onuma; Grall, Simon; Chayasombat, Bralee; Thanachayanont, Chanchana; Hochart, Xavier; Bernard, J.; Debéda, Hélène

doi:10.1007/s10832-019-00190-7

Cited by 10 publications

(13 citation statements)

References 44 publications

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“…In this work, as in Birol et al's work [19] on LTTC ceramic MEMS, the sacrificial layer was a screen-printed carbon layer that burnt out above 800 °C. Very recently, other options of a sacrificial layer based on polyester or on epoxy loaded with corn starch were studied by Santawitee et al and Grall et al [24,25]. These sacrificial layers were fully removed during the sintering of the structural layers; as a result, highly densified piezoelectric cantilevers or disk types were obtained.…”

Section: Thick-film Ceramic Memsmentioning

confidence: 99%

“…Finally, the device showed improved performances with better piezoelectric coefficient d33 for the sintering temperature of 950 °C, but more cracks were noticed compared to the sintering performed at 850 °C. [24,36] used a polyester sacrificial layer and successfully released PZT disks and cantilevers, while obtaining density values close to those of bulk ceramics. In this case, considering a cantilever of dimensions 8 × 2 × 0.1 mm 2 , made of PZT with LBCu as a sintering aid and Au electrodes, a typical shrinkage of 13% was obtained after firing at 900 • C. Moreover, with the same sintering conditions but with a disk shape, changing the electrode from Au to AgPd led to enhanced piezoelectric properties.…”

Section: Carbon Approachmentioning

confidence: 99%

“…To sum up, the microstructures of PZT thick-film layers depend on the nature of the supporting layer and/or on the substrate on which they are sintered. In addition to the influence of sintering conditions and as illustrated in Figure 7, lateral shrinkage can also be improved by adapting the sacrificial layer nature [24,25,30].…”

Section: Carbon Approachmentioning

confidence: 99%

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The Role of Sacrificial and/or Protective Layers to Improve the Sintering of Electroactive Ceramics: Application to Piezoelectric PZT-Printed Thick Films for MEMS

et al. 2020

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Piezoelectric thick films are of real interest for devices such as ceramic Micro-ElectroMechanical Systems (MEMS) because they bridge the gap between thin films and bulk ceramics. The basic design of MEMS includes electrodes, a functional material, and a substrate, and efforts are currently focused on simplified processes. In this respect, screen-printing combined with a sacrificial layer approach is attractive due to its low cost and the wide range of targeted materials. Both the role and the nature of the sacrificial layer, usually a carbon or mineral type, depend on the process and the final device. First, a sacrificial layer method dedicated to screen-printed thick-film ceramic and LTCC MEMS is presented. Second, the recent processing of piezoelectric thick-film ceramic MEMS using spark plasma sintering combined with a protective layer approach is introduced. Whatever the approach, the focus is on the interdependent effects of the microstructure, chemistry, and strain/stress, which need to be controlled to ensure reliable and performant properties of the multilayer electroceramics. Here the goal is to highlight the benefits and the large perspectives of using sacrificial/protective layers, with an emphasis on the pros and cons of such a strategy when targeting a complex piezoelectric MEMS design.

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Section: Thick-film Ceramic Memsmentioning

confidence: 99%

Section: Carbon Approachmentioning

confidence: 99%

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The Role of Sacrificial and/or Protective Layers to Improve the Sintering of Electroactive Ceramics: Application to Piezoelectric PZT-Printed Thick Films for MEMS

et al. 2020

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“…In the last years, a huge science community interest was shown in 3D printing of piezoelectric materials. Researchers already proved that both piezoelectric composites [1,2,[5][6][7][8][9] and piezoelectric solid ceramics [10][11][12][13][14][15][16] could be directly 3D printed with the stereolithography process. 3D printing provides a geometrical degree of freedom, which with proper designing [2] and chemical modification methods [7,9] allowing achieve extremely enhanced piezoelectric properties of flexible, 3D printed composites [1,7,9].…”

Section: Introductionmentioning

confidence: 99%

Investigation and Attempt to 3D Print Piezoelectric 0-3 Composites Made of Photopolymer Resins and PZT

Mitkus

Pierou

Feder

et al. 2020

ASME 2020 Conference on Smart Materials, Adaptive Structures and Intelligent Systems

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The present study demonstrates the manufacturing and characterization of 0-3 piezoelectric composites made of up to 10 vol% of Lead Zirconate Titanate (PZT) particles and photopolymer resins. The tape-casting method was used to investigate the curing behavior, PZT loading limitations and the overall feasibility of the suspensions for 3D printing. Piezoelectric composites were 3D printed with a commercial DLP type 3D printer. As a starting point, the maximum possible vol% loading of PZT ceramic for each photopolymer resin was investigated. Five different commercially available photopolymer resins from Formlabs (Somerville, MA, US) were used. It was found that the addition of PZT particles to the photopolymer increases the time required for the photopolymer to solidify because PZT particles scatter the UV light. The approximate solidification time of each composition was measured, followed by viscosity measurements. SEM imaging of the composites showed good particle dispersion with minimum agglomeration, low particle sedimentation, but the weak bond between PZT particles and the photopolymers. Best performed material composition with 10 vol% of PZT was used for 3D printing. An attempt to shorten exposure time during printing was done by adding photoinitiator TPO. Suspensions with and without TPO were 3D printed and compared.

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“…Nowadays, micro-scale piezoelectric devices with high sensitivity are much in demand for transducer technologies. Santawitee et al [35] suggested a low-cost technology consisting of a screen-printing process associated with a sacrificial layer for the preparation of microceramic-disks. These printed microdisks were based on a PZT layer sandwiched between two printed electrodes.…”

Section: Introductionmentioning

confidence: 99%

Frequency characteristics of a GPL-reinforced composite microdisk coupled with a piezoelectric layer

et al. 2020

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This is the first research on the frequency analysis of a graphene nanoplatelet composite (GPLRC) microdisk in the framework of a numerical-based generalized differential quadrature method. The stresses and strains are obtained using the higher-order shear deformable theory. Rule of mixture is employed to obtain varying mass density, thermal expansion, and Poisson's ratio, while module of elasticity is computed by modified Halpin-Tsai model. Governing equations and boundary conditions of the GPLRC microdisk covered with piezoelectric layer are obtained by implementing Hamilton's principle. Regarding perfect bonding between the piezoelectric layer and core, the compatibility conditions are derived. In addition, due to the existence of piezoelectric layer, Maxwell's equation is derived. The results show that outer-to-inner ratio of radius (R o /R i ), ratios of length scale and nonlocal to thickness (l/h and μ/h), ratio of piezoelectric to core thickness (h p /h), applied voltage, and GPL weight fraction (g GPL ) have significant influence on the frequency characteristics of the GPLRC microdisk. Another important consequence is that in addition to the nonlinear indirect effects of applied voltage on the natural frequency of the GPLRC microdisk covered with piezoelectric for each specific value of R o /R i , the impact of the R o /R i on the natural frequency is indirect. A useful suggestion of this research is that, for designing the GPLRC circular microplate at the low value of the R o /R i should be more attention to the g GPL and R o /R i , simultaneously.

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Processing of printed piezoelectric microdisks: effect of PZT particle sizes and electrodes on electromechanical properties

Cited by 10 publications

References 44 publications

The Role of Sacrificial and/or Protective Layers to Improve the Sintering of Electroactive Ceramics: Application to Piezoelectric PZT-Printed Thick Films for MEMS

The Role of Sacrificial and/or Protective Layers to Improve the Sintering of Electroactive Ceramics: Application to Piezoelectric PZT-Printed Thick Films for MEMS

Investigation and Attempt to 3D Print Piezoelectric 0-3 Composites Made of Photopolymer Resins and PZT

Frequency characteristics of a GPL-reinforced composite microdisk coupled with a piezoelectric layer

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