Process research of high aspect ratio microstructure using SU-8 resist

Liu, J.; Cai, Bingchu; Zhu, Jiali; Ding, Guifu; Zhao, Xiaomei; Yang, Ching‐Fen; Chen, D.

doi:10.1007/s00542-002-0242-2

Cited by 75 publications

(41 citation statements)

References 13 publications

(2 reference statements)

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“…16 However, SU8 has been proven to be very sensitive to process conditions 17 and one of the resulting consequences is the large internal stress generated during this process, 18 which causes feature distortion, dimensional change, and cracks. From this design, it was found that the post exposure bake temperature (PEB) and exposure area are important factors that define feature fidelity.…”

Section: Resultsmentioning

confidence: 99%

Flexible polymeric rib waveguide with self-align couplers system

Huang

Wang

2008

Journal of Vacuum Science &Amp; Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena

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The authors report a polymeric based rib waveguide with U shape self-align fiber couplers system using a simple micromolding process with SU8 as a molding material and polydimethysiloxane as a waveguide material. The material is used for its good optical transparency, low surface tension, biocompatibility, and durability. Furthermore, the material is highly formable. This unique fabrication molding technique provides a means of keeping the material and manufacturing costs to a minimum. The self-align fiber couplers system also proves a fast and simple means of light coupling. The flexible nature of the waveguide material makes this process ideal for a potential wearable optical sensor.

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Section: Resultsmentioning

confidence: 99%

Flexible polymeric rib waveguide with self-align couplers system

Huang

Wang

2008

Journal of Vacuum Science &Amp; Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena

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“…2. To produce polydimethylsiloxane (PDMS) substrates with micro-channels, create an SU8 mold using standard lithography processes 5 . Note: The channel size is designed for each specific particle's dimension.…”

Section: Thermal Particle Detection (Tpd)mentioning

confidence: 99%

Thermal Measurement Techniques in Analytical Microfluidic Devices

Davaji

Lee

2015

JoVE

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Thermal measurement techniques have been used for many applications such as thermal characterization of materials and chemical reaction detection. Micromachining techniques allow reduction of the thermal mass of fabricated structures and introduce the possibility to perform high sensitivity thermal measurements in the micro-scale and nano-scale devices. Combining thermal measurement techniques with microfluidic devices allows performing different analytical measurements with low sample consumption and reduced measurement time by integrating the miniaturized system on a single chip. The procedures of thermal measurement techniques for particle detection, material characterization, and chemical detection are introduced in this paper. Video LinkThe video component of this article can be found at

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“…SU-8 is a negative, epoxy type, near-UV photoresist, which has been specifically developed for ultra-thick, high-aspect-ratio structures such as found in microelectromechanical systems (MEMS) that can be fabricated using standard lithography equipment [59]. SU-8 photoresist is called negative as the areas exposed to light become cross-linked and so remain on the substrate during the development while the unexposed areas are removed away after development.…”

Section: Fabrication Processmentioning

confidence: 99%

Method of measuring nitric oxide release by vascular endothelial cells grown in microfluidic channels

et al. 2014

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In this thesis, a simple and versatile method is developed which enables detection of nitric oxide (NO) released from vascular endothelial cells (ECs) cultured in microfluidic structures. The new culturing system and NO measurement method allow cell shape to be controlled in a non-invasive manner using microfluidic structures while NO release is monitored for cell shape versus function studies. The culturing system consists of arrays of polydimethylsiloxane (PDMS) fluidic channels 120 micrometers in depth and ranging from 100 micrometers to 3 mm in width. The number of channels in each array is varied to yield a constant cell culture surface area (75 mm 2 ) independent of channel width. The channel surfaces are collagen-coated and ECs are cultured to confluence within the channels. A cell scraper is then used to scrape extraneous cells cultured between channels, and NO measurements are made 18 to 24 hours later. A chemiluminescence-based sensor system (NOA 280i, Sievers NO Analyzer) is utilized to measure sample NO. Initial results indicate that NO concentrations can be measured from different microfluidic channel-containing samples using this method. Initial results suggest that there is no significant difference in NO concentration derived from channels of different widths even though the degree of cell elongation varies due to physical constraint by microfluidic channel walls. Cells treated with TNFα appear more elongated and release slightly more NO than untreated cells in fluidic channels; however, the ANOVA test indicates that this difference may not be significant for both microfluidic channels or fluidic channels and forms a basis for further study.

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Process research of high aspect ratio microstructure using SU-8 resist

Cited by 75 publications

References 13 publications

Flexible polymeric rib waveguide with self-align couplers system

Flexible polymeric rib waveguide with self-align couplers system

Thermal Measurement Techniques in Analytical Microfluidic Devices

Method of measuring nitric oxide release by vascular endothelial cells grown in microfluidic channels

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