Abstract:Ultra-smooth optical surfaces are very important in widely fields. They’re not only used in optics, but also in the electronics. Ultra-smooth surfaces are difficult to process, because the rms is less than 1nm. The process methods have Teflon Polishing, Float Polishing (FP), Magnetorheological Finishing (MRF) and Ion Beam Figuring (IBF) etc. Compared with conventional polishing, IBF have higher processing quality and efficiency. Low-energy (<2Kev) IBF can form the self-organized nanopatterns on optical surf… Show more
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