Process optimisation of a MEMS based PZT actuated microswitch

Tommasi, Alessio; Coletta, Giorgia; Balma, D.; Perrone, Denis; Canavese, Giancarlo; Stassi, Stefano; Bianco, Stefano; Cocuzza, Matteo; Pirri, Candido Fabrizio

doi:10.1016/j.mee.2014.04.005

Cited by 11 publications

(3 citation statements)

References 23 publications

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“…By virtue of these electronic and optical properties, PZT meets the requirements for numerous technological applications. This material is used in nonvolatile random access memory (NVRAM), high power dielectric energy storage, high-performance ferroelectric capacitors, infrared sensors, and micro-electromechanical systems (MEMS) [1][2][3].…”

Section: Introductionmentioning

confidence: 99%

Annealing-induced changes in chemical bonding and surface characteristics of chemical solution deposited Pb0.95La0.05Zr0.54Ti0.46O3 thin films

Batra

Ramana

Kotru

2016

Applied Surface Science

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We report the effect of post deposition annealing temperature (T a = 550 and 750 o C) on the surface morphology, chemical bonding and structural development of Lanthanum doped lead zirconate titanate (Pb 0.95 La 0.05 Zr 0.54 Ti 0.46 O 3 ; referred to PLZT) thin films prepared using chemical solution deposition method. Atomic force microscopy demonstrates formation of nanocrystallites in the film annealed at T a =750 o C. X-ray photoelectron spectroscopy (XPS) analyses indicate that the binding energies (BE) of the Pb 4f , Zr 3d, and Ti 2p doublet experience a positive energy shift at T a = 750 o C, whereas the BE of O 1s and La 3d doublet show negative shift with respect to the BE of the films annealed at T a =550 o C. Thermal induced crystallization and chemical modification is evident from XPS results. The Ar+ sputtering of the films reveal change in oxidation state and chemical bonding between the constituent atoms, with respect to T a. Raman spectroscopy used to study phonon-light interactions show the shift in longitudinal and transverse optical modes with the change in T a , confirming the change in phase and crystallinity of these films. The results suggest annealing at T a = 750 o C yield crystalline perovskite PLZT films, which is essential to obtain photovoltaic response from devices based on such films.

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Section: Introductionmentioning

confidence: 99%

Annealing-induced changes in chemical bonding and surface characteristics of chemical solution deposited Pb0.95La0.05Zr0.54Ti0.46O3 thin films

Batra

Ramana

Kotru

2016

Applied Surface Science

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“…Piezoelectric is further employed in actuating the microswitches. A simple piezoelectrical cantilever beam is introduced by Tommasi et al [11]. A development of cantilever structure formed on piezoelectric and thin film is demonstrated by Chen et al [12], the device driven by piezoelectric with many dimensions so that the investigation of contact force is achieved.…”

Section: Introductionmentioning

confidence: 99%

Design Microswitch Based on a Compliant Bistable Mechanism with Triple Stepped Beam Structure

2020

IJETER

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A new design of a bistable microswitch based on a triple stepped beam structure is presented. The device is suitable for complementary metal-oxide-semiconductor (CMOS)compatible microelectromechanical system (MEMS) processes. The design of the device is based on Taiwan Semiconductor Manufacturing Company (TSMC) two-poly four-metal (2P4M) process. Finite element analyses are utilized in design of the bistable micro switch. Switching between the bistable states is accomplished electrostatically. The device requires a very low input force, nearly 0.85 mN and 0.23 mN for on and off switch operation, respectively.

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“…By employing thin films with good thermal insulation as the membrane structural material, the micro-hotplate presents a series of advantages such as miniaturized size, fast response, high sensitivity and low power consumption [ 7 , 8 , 9 , 10 ]. Non-stoichiometric low stress silicon nitride (SiN) grown by Low Pressure Chemical Vapor Deposition (LPCVD) is a very common choice allowing to obtain very flat suspended membranes with high electrical and thermal insulation suitable for the micro-hotplate fabrication as reported by recent literature in this field [ 11 , 12 , 13 ]. The suspended membrane approach is fundamental to obtain very low heating inertia and high responsive sensors.…”

Section: Introductionmentioning

confidence: 99%

Modeling, Fabrication and Testing of a Customizable Micromachined Hotplate for Sensor Applications

Tommasi

Cocuzza

Perrone

et al. 2016

Sensors

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In the sensors field the active sensing material frequently needs a controlled temperature in order to work properly. In microsystems technology, micro-machined hotplates represent a platform consisting of a thin suspended membrane where the sensing material can be deposited, usually integrating electrical stimuli and temperature readout. The micro-hotplate ensures a series of advantages such as miniaturized size, fast response, high sensitivity, low power consumption and selectivity for chemical sensing. This work compares the coplanar and the buried approach for the micro-hotplate heaters design with the aim to optimize the fabrication process and to propose a guideline for the choice of the suitable design with respect to the applications. In particular, robust Finite Element Method (FEM) models are set up in order to predict the electrical and thermal behavior of the micro-hotplates. The multiphysics approach used for the simulation allows to match as close as possible the actual device to the predictive model: geometries, materials, physics have been carefully linked to the fabricated devices to obtain the best possible accuracy. The materials involved in the fabrication process are accurately selected in order to improve the yield of the process and the performance of the devices. The fabricated micro-hotplates are able to warm the active region up to 400 °C (with a corresponding power consumption equal to 250 mW @ 400 °C) with a uniform temperature distribution in the buried micro-hotplate and a controlled temperature gradient in the coplanar one. A response time of about 70 ms was obtained on the virtual model, which perfectly agrees with the one measured on the fabricated device. Besides morphological, electrical and thermal characterizations, this work includes reliability tests in static and dynamic modes.

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Process optimisation of a MEMS based PZT actuated microswitch

Cited by 11 publications

References 23 publications

Annealing-induced changes in chemical bonding and surface characteristics of chemical solution deposited Pb0.95La0.05Zr0.54Ti0.46O3 thin films

Annealing-induced changes in chemical bonding and surface characteristics of chemical solution deposited Pb0.95La0.05Zr0.54Ti0.46O3 thin films

Design Microswitch Based on a Compliant Bistable Mechanism with Triple Stepped Beam Structure

Modeling, Fabrication and Testing of a Customizable Micromachined Hotplate for Sensor Applications

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