2012 7th International Conference on Electrical and Computer Engineering 2012
DOI: 10.1109/icece.2012.6471604
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Process modeling of polymeric optical waveguide using artificial neural network

Abstract: Polymeric optical waveguides have recently drawn a great interest in the fabrication of many functional optical devices. Photolithography is the widely used technique for the fabrication of such waveguides. To facilitate low-cost manufacturing and to achieve high reproducibility, determination and control of the process parameter in the different fabrication steps is very important. However, the mathematical modeling of waveguide fabrication process is quite difficult due to complex physical/chemical sub-proce… Show more

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