Process integration of carbon nanotubes into microelectromechanical systems

Jungen, A.; Stampfer, Christoph; Hoetzel, J.; Bright, Victor M.; Hierold, Christofer

doi:10.1016/j.sna.2005.12.019

Cited by 36 publications

(24 citation statements)

References 13 publications

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“…Single-walled carbon nanotubes suspended on microtrench SWNT bridges were synthesized by catalytic thermal chemical vapor deposition ͑CVD͒ in a low pressure furnace. 40,41 Prior to the CVD growth, microchips were fabricated by surface micromachining of 1.5 m thick polycrystalline silicon ͑poly-Si͒ layers. The poly-Si layers were uniformly coated with a bimetallic thin film of 8 nm Al and 1 nm Ni in a sputter system.…”

Section: Methodsmentioning

confidence: 99%

Adhesion and friction of a multiwalled carbon nanotube sliding against single-walled carbon nanotube

et al. 2008

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The adhesion and friction at crossed nanotube junctions were investigated in ambient by using an atomic force microscope ͑AFM͒ in tapping mode. A multiwalled carbon nanotube ͑MWNT͒ tip attached to a conventional AFM probe was scanned across a single-walled carbon nanotube ͑SWNT͒ suspended over a 2-m-wide trench. The interaction between nanotubes was found to critically depend on the morphology of the MWNT tip, which was determined from force-distance curves and scans performed against hard trench surface. The interaction between nanotubes caused the attenuation of vibrational amplitude of AFM cantilever, from which the frictional force between nanotubes was obtained by analyzing the dissipated vibrational power of cantilever. The adhesive force between nanotubes was measured from the vertical cantilever deflection when the MWNT tip end detached from the shell of the SWNT. From the friction and adhesion data, an experimental value of coefficient of friction of 0.006Ϯ 0.003 is obtained for the sliding between nanotubes, which is comparable to the reported value of graphite on nanoscale. The shear strength between nanotubes is derived to be 4 Ϯ 1 MPa by using a continuum model, which is in accordance with the value of 2 MPa reported for the sliding of MWNT on graphite in ambient. It is nearly 2 orders of magnitude larger than the interlayer shear strength of 0.05 MPa reported for MWNT in vacuum. We attribute the difference between the intertube and the interlayer frictions to the presence of water at the nanotube-nanotube interface in ambient.

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Section: Methodsmentioning

confidence: 99%

Adhesion and friction of a multiwalled carbon nanotube sliding against single-walled carbon nanotube

et al. 2008

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“…12 In short, SWNT bridges, suspended on top of polycrystalline silicon trenches of 2 m wide and 1.5 m deep, were synthesized by catalytic thermal CVD in a low-pressure furnace. 17,18 The MWNT tip was prepared by mounting an individual MWNT, grown by CVD on a Pt wire coated with a liquid catalyst solution, to the tip of a conventional AFM probe using a micromanipulator operated under an inverted microscope. 16 The scanning electron microscopy ͑SEM͒ image for the MWNT tip used here is displayed in Fig.…”

Section: Methodsmentioning

confidence: 99%

Adhesion and friction between individual carbon nanotubes measured using force-versus-distance curves in atomic force microscopy

Bhushan

Ling

2008

Phys. Rev. B

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The adhesion and friction between individual nanotubes was investigated in ambient using a dynamic atomic force microscope ͑AFM͒ operating in force-calibration mode to capture force-versus-distance curves. A multiwalled carbon nanotube ͑MWNT͒ tip attached to a conventional AFM probe was brought into contact with and then ramped in vertical direction against a single-walled carbon nanotube ͑SWNT͒ bridge suspended over a 2-m-wide trench. The interaction between nanotubes altered the oscillation amplitude, phase lag, and average deflection of AFM cantilever, from which the interacting forces between nanotubes are quantitatively derived. During ramping, a stick-slip motion was found to dominate the sliding between the nanotubes. The stick was attributed to the presence of high-energy points, such as structural defects or coating of amorphous carbon, on the surface of the MWNT tip. The coefficients of static friction and shear strength between nanotubes were evaluated to be about 0.2 and 1.4 GPa, respectively. They are about 2 orders of magnitude larger than the kinetic counterparts. The kinetic values are on the same order as that measured previously by sliding a MWNT tip across a SWNT bridge in lateral direction.

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“…Details about the catalytic thermal CVD can be found elsewhere [10]. After the completion of the CVD growth process step, the chips are subjected to a HF wet-etch step (HF 40% for 3 min) to release the grid.…”

Section: Design and Fabricationmentioning

confidence: 99%

A method for enhanced analysis of specific as‐grown carbon nanotubes

Jungen

Stampfer

Durrer

et al. 2006

Physica Status Solidi (b)

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We present the design of a microsystem along with a series of process steps to integrate carbon nanotubes in a scalable way that allows them for analysis in various experimental equipments. The microsystems consist of drilled thin silicon layers on top of a substrate which accommodate the nanostructures by chemical vapor deposition (CVD) directly within their drills. These layers can then be manipulated in a way that enables the usage of laboratory apparatus requiring substrate-less samples like transmission electron microscopy. Scanning electron microscopy is used as an analysis tool to identify the presence and location relative to the microsystem structure. Raman microscopy is used subsequently to confirm the detection and location of the nanostructures and to gain insights into their structural properties. The suggested technique is compatible with various CVD'ed nanowires or nanofibers.

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Process integration of carbon nanotubes into microelectromechanical systems

Cited by 36 publications

References 13 publications

Adhesion and friction of a multiwalled carbon nanotube sliding against single-walled carbon nanotube

Adhesion and friction of a multiwalled carbon nanotube sliding against single-walled carbon nanotube

Adhesion and friction between individual carbon nanotubes measured using force-versus-distance curves in atomic force microscopy

A method for enhanced analysis of specific as‐grown carbon nanotubes

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