2013
DOI: 10.1166/sl.2013.2818
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Process-Independent Integrated Sensitivity Calibration of 3D Hall Sensors

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“…Furthermore, several measurements during this self-calibration and a statistical evaluation of the resulting variations are used to check whether the applied external field has changed during this procedure, which could lead to false values for offset and offset TC; for further details, the reader is referred to Stahl-Offergeld et al (2009). In addition, other production-related parameters of the sensor chip can be determined with a suitable strategy combining on-chip measurements and digital evaluation (Stahl-Offergeld et al, 2010;Stahl-Offergeld, 2011). This example shows that even a seemingly simple Hall sensor today determines the required measurement value based on a complex digital process.…”
Section: State-of-the-art and Current Trendsmentioning
confidence: 99%
“…Furthermore, several measurements during this self-calibration and a statistical evaluation of the resulting variations are used to check whether the applied external field has changed during this procedure, which could lead to false values for offset and offset TC; for further details, the reader is referred to Stahl-Offergeld et al (2009). In addition, other production-related parameters of the sensor chip can be determined with a suitable strategy combining on-chip measurements and digital evaluation (Stahl-Offergeld et al, 2010;Stahl-Offergeld, 2011). This example shows that even a seemingly simple Hall sensor today determines the required measurement value based on a complex digital process.…”
Section: State-of-the-art and Current Trendsmentioning
confidence: 99%
“…However, the above sensors and measurement methods or because of limited range and slow response, or because the price is expensive and can not meet the requirements of the system in this paper and the larger the size of the overall structure, measurement performance vulnerable to humidity, dust and other effects these measurement sensors have a certain similarity, are basically composed of two parts consisting of the scale and the detecting element [5][6][7][8][9].…”
Section: Introductionmentioning
confidence: 99%