Proceedings of the 1998 Bipolar/BiCMOS Circuits and Technology Meeting (Cat. No.98CH36198)
DOI: 10.1109/bipol.1998.741914
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Process HJ: a 30 GHz NPN and 20 GHz PNP complementary bipolar process for high linearity RF circuits

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Cited by 6 publications
(7 citation statements)
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“…Process HJ has been described in detail elsewhere [2]. The HJV high voltage NPN and vPNP transistors are shown schematically in cross-section in figures 1 and 2 and typical device parameters are shown in Table 1.…”
Section: Experimental Details and Resultsmentioning
confidence: 99%
“…Process HJ has been described in detail elsewhere [2]. The HJV high voltage NPN and vPNP transistors are shown schematically in cross-section in figures 1 and 2 and typical device parameters are shown in Table 1.…”
Section: Experimental Details and Resultsmentioning
confidence: 99%
“…Many complementary bipolar technologies are reported in the literature from the late 1960s to very recently [1]- [38]. From its early inception, complementary bipolar processes have been used for realizing high performance analog circuits.…”
Section: Review Of Complementary Bipolar Technologiesmentioning
confidence: 99%
“…SOI wafers make the process simpler, i.e., no n-wells are needed for the PNP device isolation, and the device size and parasitic capacitances are reduced. The use of trenches and SOI does increase the wafer cost and hence many junction isolated processes made in bulk wafers have also been reported [17], [23], [29], [30], [32], [34], [38].…”
Section: Review Of Complementary Bipolar Technologiesmentioning
confidence: 99%
“…The complementary process, HJ, was developed from an earlier NPN-only technology [1] and has been described fully elsewhere [2]. In summary, HJ includes standard NPN transistors, standard vertical PNP transistors, lateral PNP transistors, high and low value polysilicon resistors, low value capacitors (with an optional high value capacitor), integrated inductors, ESD protection and substrate contacts.…”
Section: Process Descriptionmentioning
confidence: 99%