Process exhaust duct system design in a semiconductor factory using feedback simulation method

Abstract

Conventional duct design methods either fail to achieve pressure balance and ignore energy conservation in the actual running process. A feedback simulation method that contains system simulation and correction procedure is proposed. An acidity gas exhaust system in a semiconductor factory is presented in this study to understand the characteristics of the proposed method. The results demonstrate that the feedback simulation method improves efficiency of duct system design and facilitates the pressure balance of an exhaust duct system. It also provides the energy conservation strategies for the actual operating condition during the design stage.