“…x Te 1-x materials are the typical chalcogenide alloys, which show fast and reversible transitions between resistive amorphous and conductive crystalline phases. These materials are usually used for non-volatile memory called phase change random access memory (PRAM) [10], and for high-density optical recording media [11]. On the other hand, these materials could be easily oxidized by a reactive sputtering at the normal condition.…”