Abstract:Process and device simulation of a surface acoustics wave (SAW) temperature sensor based AlN material as piezoelectric film, grown on Si wafer and patterned with Al electrodes, is described. CMOS 1 µm process is the process used to simulate a SAW sensor with number of IDT electrodes pairs Np = 16 using Silvaco software; fabrication steps inside the cleanroom are also described. The Athena Silvaco module is used for technological process simulation and the Atlas module is used to characterize the sensor in term… Show more
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