Probing the origins of magnetism in 2 at% Fe-implanted 4H-SiC

Zhang, L.; Diallo, Lindor; Fnidiki, A.; Lechevallier, L.; Declémy, A.; Lefebvre, W.

doi:10.1016/j.scriptamat.2020.07.030

Cited by 9 publications

(2 citation statements)

References 40 publications

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“…In the case of X-ray diffraction, the atomic structures of dopants cannot be obtained due to the lack of periodicity with such dopants. Atom probe tomography shows the three-dimensional dopant distributions in the film. , However, chemical information about a dopant cannot be detected. High-resolution scanning transmission electron microscopy can clarify the atomic arrangement of the dopants in real space.…”

Section: Introductionmentioning

confidence: 99%

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X-ray Absorption Fine Structural Study of Atomic Structures and Chemical States of Dopants in 4H-SiC(0001)

Tsai

Tang

Yamashita

2023

ACS Appl. Electron. Mater.

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The atomic structures and chemical states of active and inactive dopant sites in n-type and p-type 4H-SiC(0001) substrates have been investigated by X-ray absorption near edge structure (XANES) and photoelectron spectroscopy (PES). In N atom-doped n-type 4H-SiC(0001), the PES results indicated that a N− C species was formed near the surface. XANES simulations showed that SiNx and N−C species were attributed to active and inactive dopant states, respectively. Angle-resolved XANES measurements showed that the N−C species acted as an inactive dopant site in N-doped 4H-SiC(0001). In Al-doped p-type 4H-SiC, PES analysis revealed that a single chemical state was present at the Al-doped 4H-SiC. The simulated XANES spectra showed that the Si site in 4H-SiC(0001) was replaced by an Al dopant atom, which was the active dopant site. Furthermore, relaxation of the local structure around the Al dopant in Al-doped 4H-SiC(0001) was observed due to bond stretching.

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Section: Introductionmentioning

confidence: 99%

“…Atom probe tomography shows the three-dimensional dopant distributions in the film. 12,13 However, chemical information about a dopant cannot be detected. dopants in real space.…”

Section: Introductionmentioning

confidence: 99%