Probing physical quantities on the nanoscale that have directionality, such as magnetic moments, electric dipoles, or the force response of a surface, is essential for characterizing functionalized materials for nanotechnological device applications [1][2][3] . Currently, such physical quantities are usually experimentally obtained as scalars. To investigate the physical properties of a surface on the nanoscale in depth, these properties must be measured as vectors. Here we demonstrate a three-force-component detection method, based on multifrequency atomic force microscopy on the subatomic scale [4][5][6][7][8][9] and apply it to a Ge(001)-c(4 × 2) surface. We probed the surface-normal and surface-parallel force components above the surface and their direction-dependent anisotropy and expressed them as a three-dimensional force vector distribution. Access to the atomic-scale force distribution on the surface will enable better understanding of nanoscale surface morphologies, chemical composition and reactions 10,11 , probing nanostructures via atomic or molecular manipulation 12,13 , and provide insights into the behaviour of nano-machines on substrates 14,15 . Noncontact atomic force microscopy (AFM) is an excellent tool not only for characterizing the atomic order on a surface but also for detecting the exchange, electrostatic, and chemical force interactions between the AFM tip and the sample surface [16][17][18][19] . However, the conventional AFM, in which the force sensor oscillates perpendicular to the surface, reflects only the surface-normal component of the tip force and ignores the surface-parallel components. Although the parallel component of force has been calculated from the normal component using a potential mapping extraction technique, this method is only indirect [20][21][22][23][24] . To obtain the distribution of the parallel components in three-dimensions (3D) with a higher accuracy, the force sensor should be oscillated also in the direction parallel to the surface 25,26 . Recently, a multi-frequency AFM method was developed 4 with the quest to investigate the physical properties of materials in deeper detail 5,6 . This method utilizes both flexural and torsional modes of the cantilever, thereby making it useful for determining the force in a vector form by allowing the surface-normal (Z direction) and one of the surface-parallel force components (along the X or Y direction) to be simultaneously measured 9 . Here we propose to detect all three components (X , Y and Z) of the total tip-surface force. For that purpose we use a clean Ge(001) surface. The surface has alternately aligned buckling dimers that form an anisotropic c(4 × 2) structure even at room temperature 19 .As shown in Fig. 1, this surface has a structure wherein two domains are separated by a single step; across this step, the dimers are at an angle of 90• to each other. Therefore, both X and Y surface-parallel components of the tip-surface interaction can be obtained from both domains without the need to rotate the tip or t...