Probing Co/Si interface behaviour by X-ray photoelectron spectroscopy (XPS) and atomic force microscopy (AFM)

Self-encapsulation of single-texture CoSi2 nanolayer by TaSi2

“…Meanwhile, reduction of the Co concentration on the surface showed that the Co atoms diffused into the substrate via the intermediate layer. A similar behavior was also observed in [23]. This means that the required conditions for polycrystalline CoSi phase formation were provided.…”