2008
DOI: 10.1557/proc-1078-m13-01
|View full text |Cite
|
Sign up to set email alerts
|

Printing of Patterned Copper on Pliable, Microtextured PDMS/Ceramic Composites

Abstract: In this work, we present a novel printing technique that enables the usage of PDMS and ceramic powder mixed PDMS composites (we refer as “PDMS-ceramic composites” in this context), as a substrate for printing of copper conduction layers. This technique is based on microtransfer molding (μTM) and lift-off for pattern formation [4]. Another key feature is the usage of microtextured PDMS and PDMS-ceramic composites before any copper film deposition. Our microtextured surface is composed of pyramid shaped wells (1… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2
1
1

Citation Types

0
7
0

Year Published

2011
2011
2018
2018

Publication Types

Select...
3

Relationship

0
3

Authors

Journals

citations
Cited by 3 publications
(7 citation statements)
references
References 4 publications
0
7
0
Order By: Relevance
“…Polydimethylsiloxane (PDMS) has been widely used in biooptical-electrical microfluidic systems owing to its excellent chemical compatibility, optical properties and fabrication flexibility [1][2][3][4][5][6]. Microscale structures/patterns can be constructed with PDMS by using a simple mold-casting method.…”
Section: Introductionmentioning
confidence: 99%
“…Polydimethylsiloxane (PDMS) has been widely used in biooptical-electrical microfluidic systems owing to its excellent chemical compatibility, optical properties and fabrication flexibility [1][2][3][4][5][6]. Microscale structures/patterns can be constructed with PDMS by using a simple mold-casting method.…”
Section: Introductionmentioning
confidence: 99%
“…All above requirements need an effective bonding between the elastomer and the metal at the interface. There are several methods that can be used to print copper directly on to PDMS such as microtexturing, oxygen plasma treatment, and titanium adhesion layer . Oxygen plasma treatment increase the copper adhesion whereas the titanium improves the oxide bond of the metal at the interface by increasing the adhesive strength as reported in .…”
Section: Model Configurationmentioning
confidence: 97%
“…There are several methods that can be used to print copper directly on to PDMS such as microtexturing, oxygen plasma treatment, and titanium adhesion layer . Oxygen plasma treatment increase the copper adhesion whereas the titanium improves the oxide bond of the metal at the interface by increasing the adhesive strength as reported in . The titanium oxide film does not change the dielectric properties of PDMS because the adhesion layer is very thin .…”
Section: Model Configurationmentioning
confidence: 99%
“…[ 36 ] www.MaterialsViews.com www.advancedscience.com pyramid tips on PDMS/ceramic composites using microtextured nylon molds but microcracks on the Cu thin fi lm were found just after evaporation of Cu. [ 48 ] Park et al obtained periodic 1D and 2D wavy metal structures on PDMS stamp replicated from pattern-etched Si molds, but they could only be stretched uniaxially or biaxially when the tensile strain was less than 20%. [ 49 ] Compared with these literature reports, the ELD-Cu/E-petal shows obvious advantages in the stretchability range, the omnidirectional stretching capability, and the ease in fabrication.…”
Section: Doi: 101002/advs201400021mentioning
confidence: 99%
“…Lambricht et al fabricated irregular rough Au/PDMS with rough glass side molds, but its resistance change was more than 100 folds . Apaydin et al obtained Cu thin film with pyramid tips on PDMS/ceramic composites using microtextured nylon molds but microcracks on the Cu thin film were found just after evaporation of Cu . Park et al obtained periodic 1D and 2D wavy metal structures on PDMS stamp replicated from pattern‐etched Si molds, but they could only be stretched uniaxially or biaxially when the tensile strain was less than 20% .…”
mentioning
confidence: 99%